Laser tabbed die: A repairable, high-speed die-interconnection technology. 1994 LDRD final report 93-SR-089
A unique technology for multichip module production is presented. The technology, called Laser Tabbed Die (L-TAB), consists of a method for forming surface-mount-type {open_quotes}gull wing{close_quotes} interconnects on bare dice. The dice are temporarily bonded to a sacrificial substrate which has a polymer thin film coated onto it. The gull wings are formed on the side of the die with a direct-write laser patterning process which allows vertical as well as horizontal image formation. Using the laser patterning system, trenches are formed in a positive electrodeposited photoresist (EDPR) which is plated onto a metal seed layer, allowing copper to be electroplated through the resultant mask. After stripping the resist and the metal seed layer, the polymer film on the substrate is dissolved, releasing the chip with the {open_quotes}gull wings{close_quotes} intact. The chips are then bonded onto a circuit board or permanent substrate with solder or conductive adhesive.
- Research Organization:
- Lawrence Livermore National Lab., CA (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- W-7405-ENG-48
- OSTI ID:
- 120877
- Report Number(s):
- UCRL-ID--122209; ON: DE96001869
- Country of Publication:
- United States
- Language:
- English
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