Introduction to MEMS (MicroElectroMechanical Systems).
Conference
·
OSTI ID:1147456
Abstract not provided.
- Research Organization:
- Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1147456
- Report Number(s):
- SAND2007-4521C; 522365
- Country of Publication:
- United States
- Language:
- English
Similar Records
Introduction to Microelectromechanical Systems (MEMS) failure analysis.
Introduction to Microelectromechanical Systems (MEMS) Materials Fabrication Processes and Failure Analysis.
Introduction to Microelectromechanical Systems (MEMS) Materials Fabrication Processes and Failure Analysis.
Conference
·
Sun Aug 01 00:00:00 EDT 2010
·
OSTI ID:1024452
Introduction to Microelectromechanical Systems (MEMS) Materials Fabrication Processes and Failure Analysis.
Conference
·
Wed Aug 01 00:00:00 EDT 2012
·
OSTI ID:1116846
Introduction to Microelectromechanical Systems (MEMS) Materials Fabrication Processes and Failure Analysis.
Conference
·
Tue Jul 01 00:00:00 EDT 2008
·
OSTI ID:1706458