Skip to main content
OSTI.GOVU.S. Department of Energy Office of Scientific and Technical Information
U.S. Department of Energy
Office of Scientific and Technical Information
 

Introduction to Microelectromechanical Systems (MEMS) failure analysis.

Conference ·
OSTI ID:1024452

No abstract prepared.

Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1024452
Report Number(s):
SAND2010-5841C
Country of Publication:
United States
Language:
English

Similar Records

Introduction to Microelectromechanical Systems (MEMS) Materials Fabrication Processes and Failure Analysis.
Conference · Wed Aug 01 00:00:00 EDT 2012 · OSTI ID:1116846
Introduction to Microelectromechanical Systems (MEMS) Materials Fabrication Processes and Failure Analysis.
Conference · Tue Jul 01 00:00:00 EDT 2008 · OSTI ID:1706458
Introduction to MEMS (MicroElectroMechanical Systems).
Conference · Sun Jul 01 00:00:00 EDT 2007 · OSTI ID:1147456

Related Subjects

77 NANOSCIENCE AND NANOTECHNOLOGY
APPROPRIATE TECHNOLOGY
COMMERCIALIZATION
ELECTROMECHANICS
NANOSTRUCTURES