Introduction to Microelectromechanical Systems (MEMS) Materials Fabrication Processes and Failure Analysis.
Conference
·
OSTI ID:1116846
Abstract not provided.
- Research Organization:
- Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1116846
- Report Number(s):
- SAND2012-6471C; 480695
- Country of Publication:
- United States
- Language:
- English
Similar Records
Introduction to Microelectromechanical Systems (MEMS) Materials Fabrication Processes and Failure Analysis.
Introduction to Microelectromechanical Systems (MEMS) failure analysis.
Introduction to MEMS (MicroElectroMechanical Systems).
Conference
·
Tue Jul 01 00:00:00 EDT 2008
·
OSTI ID:1706458
Introduction to Microelectromechanical Systems (MEMS) failure analysis.
Conference
·
Sun Aug 01 00:00:00 EDT 2010
·
OSTI ID:1024452
Introduction to MEMS (MicroElectroMechanical Systems).
Conference
·
Sun Jul 01 00:00:00 EDT 2007
·
OSTI ID:1147456