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Effects of Gas Adsorption in Nanotribology and Demonstration of in-situ Vapor Phase Lubrication of MEMS Devices.

Conference ·
OSTI ID:1146879

Abstract not provided.

Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1146879
Report Number(s):
SAND2007-6952C; 521138
Country of Publication:
United States
Language:
English

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