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Office of Scientific and Technical Information
 

Polymer based delivery of vapor phase lubrication for MEMS devices.

Conference ·
OSTI ID:1035989
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Abstract Not Provided

Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1035989
Report Number(s):
SAND2010-8660C
Country of Publication:
United States
Language:
English

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