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U.S. Department of Energy
Office of Scientific and Technical Information
 

Thin Film Polymer Based Delivery of Vapor Phase Lubrication for MEMS Devices.

Conference ·
OSTI ID:1067645

Abstract Not Provided

Research Organization:
Sandia National Laboratories
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1067645
Report Number(s):
SAND2012-4114C
Country of Publication:
United States
Language:
English

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