Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

Observations of Gas-Phase Nanoparticles during InGaN Metalorganic Chemical Vapor Deposition.

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.3009291· OSTI ID:1142800

Abstract not provided.

Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
1142800
Report Number(s):
SAND2008-4907J; 516727
Journal Information:
Applied Physics Letters, Journal Name: Applied Physics Letters Journal Issue: 17 Vol. 93; ISSN 0003-6951
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English

Similar Records

Stress Engineering During Metalorganic Chemical Vapor Deposition of AlGaN/GaN Distributed Bragg Reflectors
Journal Article · Tue Nov 14 23:00:00 EST 2000 · Applied Physics Letters · OSTI ID:767862

Stress evolution during metalorganic chemical vapor deposition of GaN
Journal Article · Thu Dec 31 23:00:00 EST 1998 · Applied Physics Letters · OSTI ID:302888

Measurement of atomic indium during metalorganic chemical vapor deposition
Journal Article · Wed Jan 31 23:00:00 EST 1990 · Journal of Applied Physics; (USA) · OSTI ID:6935080

Related Subjects