Pulsed ion beam surface analysis (PIBSA) as a means of in-situ real-time analysis of thin films during growth
Conference
·
OSTI ID:10188117
- Argonne National Lab., IL (United States)
- Northwestern Univ., Evanston, IL (United States). Dept. of Materials Science
- Microelectronics Center of North Carolina, Research Triangle Park, NC (United States)
- Ionwerks, Inc., Houston, TX (United States)
Low energy (5-15 keV) pulsed ion beam surface analysis (PIBSA) comprises several different surface spectroscopies which provide a wide range of information relevant to growth of single and multi-component semiconductor, metal and metal oxide thin f@ and layered structures. Ion beam methods have not been widely used as an in-situ monitor of thin film growth. PIBSA has been developed as a non-destructive, in-situ, real-time probe of thin film composition and structure which does not physically interfere with deposition. Several PIBSA versions are exceptionally surface-specific, yet can yield high resolution data at ambient pressures in excess of 1 m Torr (4-5 orders of magnitude higher than conventional surface analytic methods). Therefore, PIBSA is ideal for studying ultra-thin layers and atomically abrupt interfaces. PIBSA instrumentation designed for use as an in-situ, real-time monitor of growth processes for single and multi-component thin films and layered structures is described. Representative data are shown for in-situ analysis of Pb and Zr layers at room temperature and high vacuum, as well as under conditions for growth of PZT perovskite films on MgO and RuO{sub 2} substrates.
- Research Organization:
- Argonne National Lab., IL (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- W-31109-ENG-38
- OSTI ID:
- 10188117
- Report Number(s):
- ANL/CHM/CP--80915; CONF-9311104--1; ON: DE94001276
- Country of Publication:
- United States
- Language:
- English
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Journal Article
·
Fri Jul 01 00:00:00 EDT 1994
· Journal of Vacuum Science and Technology, A (Vacuum, Surfaces and Films); (United States)
·
OSTI ID:7025164
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Wed Jun 01 00:00:00 EDT 1994
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OSTI ID:10158974
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OSTI ID:10104589
Related Subjects
07 ISOTOPE AND RADIATION SOURCES
070204
36 MATERIALS SCIENCE
360601
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400101
ACTIVATION, NUCLEAR REACTION, RADIOMETRIC, AND RADIOCHEMICAL PROCEDURES
ARGON IONS
DATA ACQUISITION SYSTEMS
DEPOSITION
INDUSTRIAL USES
RADIOMETRIC
ION BEAMS
ION SCATTERING ANALYSIS
KEV RANGE 01-10
LAYERS
MASS SPECTROSCOPY
NEON IONS
PREPARATION AND MANUFACTURE
PZT
RECOILS
THIN FILMS
TIME-OF-FLIGHT METHOD
USES
070204
36 MATERIALS SCIENCE
360601
37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400101
ACTIVATION, NUCLEAR REACTION, RADIOMETRIC, AND RADIOCHEMICAL PROCEDURES
ARGON IONS
DATA ACQUISITION SYSTEMS
DEPOSITION
INDUSTRIAL USES
RADIOMETRIC
ION BEAMS
ION SCATTERING ANALYSIS
KEV RANGE 01-10
LAYERS
MASS SPECTROSCOPY
NEON IONS
PREPARATION AND MANUFACTURE
PZT
RECOILS
THIN FILMS
TIME-OF-FLIGHT METHOD
USES