Atomic resolution electron energy loss spectroscopy in the scanning transmission electron microscope

Conference · Tue Jun 01 04:00:00 EDT 1993

OSTI ID:10163693

Browning, N D; Chisholm, M F; Pennycook, S J

Electron energy loss spectroscopy (EELS) in the scanning transmission electron microscope (STEM) is an invaluable tool for the microanalysis of materials, providing information on both compositional and electronic structure fluctuations on the sub-nanometre scale. To utilise fully the high resolution potential of the energy loss signal, it is essential to have a reference high-resolution image showing the atomic structure in the region of study. The recently developed high-resolution Z-contrast imaging technique for the STEM, provides an intuitive reference image of the atomic structure that, as both imaging and microanalysis can be performed simultaneously, can be conveniently used to position the electron probe over individual atomic columns. The spatial resolution of both the image and the energy loss spectrum can be identical, and in principle limited only by the probe size of the microscope. Therefore, for the 2.2{Angstrom} probe size of the VG HB501 UX dedicated STEM, there exists the ability to be able to resolve individual atomic columns or planes.

• Research Organization: Oak Ridge National Lab., TN (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: AC05-84OR21400
• OSTI ID: 10163693
• Report Number(s): CONF-930755--3; ON: DE93015334
• Country of Publication: United States
• Language: English

Related Subjects

37 INORGANIC, ORGANIC, PHYSICAL, AND ANALYTICAL CHEMISTRY
400102
440800
47 OTHER INSTRUMENTATION
665000
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
CHEMICAL AND SPECTRAL PROCEDURES
COBALT SILICIDES
ELECTRON MICROSCOPES
ELECTRON MICROSCOPY
ENERGY-LOSS SPECTROSCOPY
IMAGES
MISCELLANEOUS INSTRUMENTATION
PHYSICS OF CONDENSED MATTER
SILICON
SPATIAL RESOLUTION