Multilayer Laue lens : a path toward one nanometer x-ray focusing.

Journal Article · Fri Jan 01 04:00:00 EST 2010 · X-Ray Opt. Instrum.

DOI:https://doi.org/10.1155/2010/401854· OSTI ID:1012811

Yan, H; Kang, H C; Conley, R; Liu, C; Macrander, A T; Stephenson, G B; Maser, J ^[1]

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1. Advanced Photon Source

The multilayer Laue lens (MLL) is a novel diffractive optic for hard X-ray nanofocusing, which is fabricated by thin film deposition techniques and takes advantage of the dynamical diffraction effect to achieve a high numerical aperture and efficiency. It overcomes two difficulties encountered in diffractive optics fabrication for focusing hard X-rays: (1) small outmost zone width and (2) high aspect ratio. Here, we will give a review on types, modeling approaches, properties, fabrication, and characterization methods of MLL optics. We show that a full-wave dynamical diffraction theory has been developed to describe the dynamical diffraction property of the MLL and has been employed to design the optimal shapes for nanofocusing. We also show a 16 nm line focus obtained by a partial MLL and several characterization methods. Experimental results show a good agreement with the theoretical calculations. With the continuing development of MLL optics, we believe that an MLL-based hard x-ray microscope with true nanometer resolution is on the horizon.

• Research Organization: Argonne National Laboratory (ANL)
• Sponsoring Organization: SC; National Research Foundation of Korea
• DOE Contract Number: AC02-06CH11357
• OSTI ID: 1012811
• Report Number(s): ANL/MSD/JA-69874
• Journal Information: X-Ray Opt. Instrum., Journal Name: X-Ray Opt. Instrum. Journal Issue: 2010 Vol. 2010
• Country of Publication: United States
• Language: ENGLISH

Related Subjects

47 OTHER INSTRUMENTATION
DEPOSITION
DESIGN
DIFFRACTION
EFFICIENCY
FABRICATION
FOCUSING
HARD X RADIATION
LAUE METHOD
LENSES
PERFORMANCE
RESOLUTION
THIN FILMS