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Achieving hard X-ray nanofocusing using a wedged multilayer Laue lens

Journal Article · · Optics Express
DOI:https://doi.org/10.1364/OE.23.012496· OSTI ID:1215667
 [1];  [2];  [1];  [1];  [3];  [3];  [1];  [1];  [1];  [3];  [4];  [1];  [1]
  1. Brookhaven National Lab. (BNL), Upton, NY (United States)
  2. Brookhaven National Lab. (BNL), Upton, NY (United States); Argonne National Lab. (ANL), Argonne, IL (United States)
  3. Argonne National Lab. (ANL), Argonne, IL (United States)
  4. Univ. College London, London (United Kingdom); Research Complex at Hartwell, Oxfordshire (United Kingdom)
+ Show Author Affiliations
We report on the fabrication and the characterization of a wedged multilayer Laue lens for x-ray nanofocusing. The lens was fabricated using a sputtering deposition technique, in which a specially designed mask was employed to introduce a thickness gradient in the lateral direction of the multilayer. X-ray characterization shows an efficiency of 27% and a focus size of 26 nm at 14.6 keV, in a good agreement with theoretical calculations. These results indicate that the desired wedging is achieved in the fabricated structure. We anticipate that continuous development on wedged MLLs will advance x-ray nanofocusing optics to new frontiers and enrich capabilities and opportunities for hard X-ray microscopy.
Research Organization:
Argonne National Laboratory (ANL), Argonne, IL (United States); Brookhaven National Laboratory (BNL), Upton, NY (United States)
Sponsoring Organization:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Grant/Contract Number:
AC02-06CH11357
OSTI ID:
1215667
Alternate ID(s):
OSTI ID: 1228901
OSTI ID: 1391867
Journal Information:
Optics Express, Journal Name: Optics Express Journal Issue: 10 Vol. 23; ISSN 1094-4087; ISSN OPEXFF
Publisher:
Optical Society of America (OSA)Copyright Statement
Country of Publication:
United States
Language:
English

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Cited By (12)

3D Nanofabrication of High-Resolution Multilayer Fresnel Zone Plates journal June 2018
Nanofocusing of X-ray free-electron laser using wavefront-corrected multilayer focusing mirrors journal November 2018
Multimodal hard x-ray imaging with resolution approaching 10 nm for studies in material science journal March 2018
Point focusing with flat and wedged crossed multilayer Laue lenses journal February 2017
A versatile nanoreactor for complementary in situ X-ray and electron microscopy studies in catalysis and materials science journal August 2019
Zone Plates for X-Ray Focusing (Review) journal November 2017
Multilayer Laue lenses at high X-ray energies: performance and applications journal January 2019
Achieving diffraction-limited nanometer-scale X-ray point focus with two crossed multilayer Laue lenses: alignment challenges journal January 2017
Multi-slice ptychography with large numerical aperture multilayer Laue lenses journal January 2018
Multilayer Laue lenses at high x-ray energies: Performance and applications text January 2019
High-throughput synthesis of modified Fresnel zone plate arrays via ion beam lithography journal January 2018
A versatile nanoreactor for complementary in situ X-ray and electron microscopy studies in catalysis and materials science text January 2019

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Related Subjects

42 ENGINEERING
X-ray optics
deposition and fabrication
image reconstruction techniques
phase retrieval