Achieving hard X-ray nanofocusing using a wedged multilayer Laue lens

Huang, Xiaojing; Conley, Raymond; Bouet, Nathalie; Zhou, Juan; Macrander, Albert; Maser, Jorg; Yan, Hanfei; Nazaretski, Evgeny; Lauer, Kenneth; Harder, Ross; Robinson, Ian K.; Kalbfleisch, Sebastian; Chu, Yong S.

doi:10.1364/OE.23.012496

Achieving hard X-ray nanofocusing using a wedged multilayer Laue lens

Journal Article · Thu Jan 01 04:00:00 EST 2015 · Optics Express

DOI:https://doi.org/10.1364/OE.23.012496· OSTI ID:1391867

Huang, Xiaojing; Conley, Raymond; Bouet, Nathalie; Zhou, Juan; Macrander, Albert; Maser, Jorg; Yan, Hanfei; Nazaretski, Evgeny; Lauer, Kenneth; Harder, Ross; Robinson, Ian K.; Kalbfleisch, Sebastian; Chu, Yong S.

We report the fabrication and the characterization of a wedged multilayer Laue lens for x-ray nanofocusing. The lens was fabricated using sputtering deposition technique, and a specially designed mask was employed to introduce a thickness gradient in the lateral direction of the multilayer. X-ray characterization showed an efficiency of 27% and a focus size of 24 nm at 14.6 keV, in a good agreement with theoretical calculations. These results indicate that the desired wedging was achieved in the fabricated wedged MLL. We anticipate that continuous development on wedged MLL will advance x-ray nanofocusing optics to new frontiers, and enriches capabilities and opportunities for hard X-ray microscopy.

Research Organization:: Argonne National Laboratory (ANL)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)

DOE Contract Number:: AC02-06CH11357

OSTI ID:: 1391867

Journal Information:: Optics Express, Journal Name: Optics Express Journal Issue: 10 Vol. 23; ISSN 1094-4087; ISSN OPEXFF

Publisher:: Optical Society of America (OSA)

Country of Publication:: United States

Language:: English

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Zone Plates for X-Ray Focusing (Review) Lider, V. V. Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques, Vol. 11, Issue 6 https://doi.org/10.1134/s1027451017060155	journal	November 2017
Multilayer Laue lenses at high X-ray energies: performance and applications Murray, Kevin T.; Pedersen, Anders F.; Mohacsi, Istvan Optics Express, Vol. 27, Issue 5 https://doi.org/10.1364/OE.27.007120	journal	January 2019
High-throughput synthesis of modified Fresnel zone plate arrays via ion beam lithography Keskinbora, Kahraman; Sanli, Umut Tunca; Baluktsian, Margarita Beilstein Journal of Nanotechnology, Vol. 9 https://doi.org/10.3762/bjnano.9.194	journal	January 2018
Multimodal hard x-ray imaging with resolution approaching 10 nm for studies in material science Yan, Hanfei; Bouet, Nathalie; Zhou, Juan Nano Futures, Vol. 2, Issue 1 https://doi.org/10.1088/2399-1984/aab25d	journal	March 2018
Multi-slice ptychography with large numerical aperture multilayer Laue lenses Öztürk, Hande; Yan, Hanfei; He, Yan Optica, Vol. 5, Issue 5 https://doi.org/10.1364/optica.5.000601	journal	January 2018
A versatile nanoreactor for complementary in situ X-ray and electron microscopy studies in catalysis and materials science Fam, Yakub; Sheppard, Thomas L.; Becher, Johannes International Union of Crystallography https://doi.org/10.5445/ir/1000099145	text	January 2019

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