Effects of acetylacetone additions on PZT thin film processing

Conference · Wed Feb 01 04:00:00 EST 1995

OSTI ID:10115149

Schwartz, R W; Assink, R A; Dimos, D; Sinclair, M B; Boyle, T J; Buchheit, C D

Sol-gel processing methods are frequently used for the fabrication of lead zirconate titanate (PZT) thin films for many electronic applications. Our standard approach for film fabrication utilizes lead acetate and acetic acid modified metal alkoxides of zirconium and titanium in the preparation of our precursor solutions. This report highlights some of our recent results on the effects of the addition of a second chelating ligand, acetylacetone, to this process. The authors discuss the changes in film drying behavior, densification and ceramic microstructure which accompany acetylacetone additions to the precursor solution and relate the observed variations in processing behavior to differences in chemical precursor structure induced by the acetylacetone ligand. Improvements in thin film microstructure, ferroelectric and optical properties are observed when acetylacetone is added to the precursor solution.

• Research Organization: Sandia National Labs., Albuquerque, NM (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 10115149
• Report Number(s): SAND--95-0091C; CONF-941144--35; ON: DE95006322
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360601
360606
ACETYLACETONE
CHEMICAL PREPARATION
DENSITY
DRYING
ELECTRICAL PROPERTIES
ELECTRO-OPTICAL EFFECTS
ELLIPSOMETRY
FERROELECTRIC MATERIALS
LIGANDS
MICROSTRUCTURE
OPTICAL PROPERTIES
PHYSICAL PROPERTIES
PREPARATION AND MANUFACTURE
PROCESSING
PYROLYSIS
PZT
SIZE
SOL-GEL PROCESS
THIN FILMS
TITANIUM
ZIRCONIUM