Effects of acetylacetone additions on PZT thin film processing

Conference · Wed Feb 01 00:00:00 EST 1995

OSTI ID:10115149

Schwartz, R W; Assink, R A; Dimos, D; Sinclair, M B; Boyle, T J; Buchheit, C D

Sol-gel processing methods are frequently used for the fabrication of lead zirconate titanate (PZT) thin films for many electronic applications. Our standard approach for film fabrication utilizes lead acetate and acetic acid modified metal alkoxides of zirconium and titanium in the preparation of our precursor solutions. This report highlights some of our recent results on the effects of the addition of a second chelating ligand, acetylacetone, to this process. The authors discuss the changes in film drying behavior, densification and ceramic microstructure which accompany acetylacetone additions to the precursor solution and relate the observed variations in processing behavior to differences in chemical precursor structure induced by the acetylacetone ligand. Improvements in thin film microstructure, ferroelectric and optical properties are observed when acetylacetone is added to the precursor solution.

• Research Organization: Sandia National Labs., Albuquerque, NM (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 10115149
• Report Number(s): SAND-95-0091C; CONF-941144-35; ON: DE95006322; TRN: 95:001605
• Resource Relation: Conference: Fall meeting of the Materials Research Society (MRS),Boston, MA (United States),28 Nov - 9 Dec 1994; Other Information: PBD: [1995]
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ACETYLACETONE
ELECTRO-OPTICAL EFFECTS
PZT
MICROSTRUCTURE
CHEMICAL PREPARATION
LIGANDS
FERROELECTRIC MATERIALS
SOL-GEL PROCESS
OPTICAL PROPERTIES
THIN FILMS
PROCESSING
TITANIUM
ZIRCONIUM
DENSITY
DRYING
ELLIPSOMETRY
ELECTRICAL PROPERTIES
SIZE
PYROLYSIS
360606
360601
PHYSICAL PROPERTIES
PREPARATION AND MANUFACTURE