Effect of sol-gel precursors on the grain structure of PZT thin films
- Inha Univ., Inchon (Korea, Republic of)
- Samsung Advanced Inst. of Tech., Kyungki (Korea, Republic of). Materials and Device Research Center
Three sol-gel solutions, namely, acetate-, 2-methoxyethoxide-, and 2-ethylhexanoate-based precursor solutions, were synthesized and utilized for the fabrication of ferroelectric lead zirconate titanate (PZT) thin films on Pt/Ti/SiO{sub 2}/Si substrates. The effect of these sol-gel precursors on the surface morphology, crystallographic phase, and ferroelectric properties of the PZT thin films is analyzed in this work. The PZT thin films prepared from the acetate-based precursor solution demonstrated homogeneous and dense grains, while those from the 2-methoxyethoxide and 2-ethylhexanoate systems exhibited large rosette structures on their surface. The correlation between the decomposition mechanism of the precursor and the formation of rosette structure in the sol-gel derived PZT films is discussed.
- OSTI ID:
- 679193
- Journal Information:
- Materials Research Bulletin, Vol. 34, Issue 5; Other Information: PBD: 15 Mar 1999
- Country of Publication:
- United States
- Language:
- English
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