The effects of modifying ligands on sol-gel thin flim processing
- Sandia National Labs., Albuquerque, NM (United States); and others
Sol-gel processing methods based on the use of modified metal alkoxide compounds have been widely used for the fabrication of ceramic thin films. To effectively control the resulting properties of the films, it is critical that the relationships between solution precursor (oligomer) nature and thin film processing behavior be understood. In the present study, we have used acetic acid (acetate) and acetylacetone as chelating ligands to modify the nature of the oligomeric species in our thin film precursor solutions. By tailoring precursor nature, we have been able to vary the consolidation, densification and crystallization behavior of thin films in the TiO{sub 2}, ZrO{sub 2} and Pb(Zr,Ti)O{sub 3} material systems. In this presentation, we will review how various aspects of the modifying ligands (steric size, residual alkoxy content, etc.) impact thin film processing by affecting variables such as precursor reactivity and aggregation behavior during deposition.
- OSTI ID:
- 126643
- Report Number(s):
- CONF-950402-; TRN: 95:006086-0628
- Resource Relation:
- Conference: 209. American Chemical Society (ACS) national meeting, Anaheim, CA (United States), 2-6 Apr 1995; Other Information: PBD: 1995; Related Information: Is Part Of 209th ACS national meeting; PB: 2088 p.
- Country of Publication:
- United States
- Language:
- English
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