Control of thin film processing behavior through precursor structural modifications
- Sandia National Labs., Albuquerque, NM (United States). Advanced Materials Lab.
In the sol-gel processing of ceramic thin films it has been frequently noted that the processing behavior, microstructure and properties of the films are dependent on the nature of the coating solution. In an attempt to understand such thin film processing-property relationships, the authors have systematically investigated the effects of varying the precursor nature on thin film densification and crystallization for ZrO{sub 2} and TiO{sub 2} films. Metal alkoxide starting compounds, e.g., zirconium n-butoxide{center_dot}n-butanol and titanium i-propoxide, were reacted with acetic acid and 2,4-pentanedione to prepare coating solutions for thin film deposition. The use of these chelating ligands resulted in solution oligomeric species of different nature. Studies of thin film processing indicated that film processing characteristics, i.e., consolidation, densification and crystallization, were strongly dependent on solution precursor nature. Ligand steric size, pyrolysis behavior, extent of chelation, and precursor reactivity were found to be key variables in controlling film processing characteristics.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 10117184
- Report Number(s):
- SAND--95-0090C; CONF-950129--2; ON: DE95006468; BR: GB0103012
- Country of Publication:
- United States
- Language:
- English
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