PLASMA WINDOW FOR VACUUM - ATMOSPHERE INTERFACE AND FOCUSING LENS OF SOURCES FOR NON-VACUUM MATERIAL MODIFICATION.

Conference · Sun Sep 07 00:00:00 EDT 1997

OSTI ID:883865

HERSHCOVITCH, A

Material modifications by ion implantation, dry etching, and micro-fabrication are widely used technologies, all of which are performed in vacuum, since ion beams at energies used in these applications are completely attenuated by foils or by long differentially pumped sections, which ate currently used to interface between vacuum and atmosphere. A novel plasma window, which utilizes a short arc for vacuum-atmosphere interface has been developed. This window provides for sufficient vacuum atmosphere separation, as well as for ion beam propagation through it, thus facilitating non-vacuum ion material modification.

• Research Organization: Brookhaven National Lab. (BNL), Upton, NY (United States)
• Sponsoring Organization: DOE/ER
• DOE Contract Number: DE-AC02-98CH10886
• OSTI ID: 883865
• Report Number(s): BNL-64733; R&D Project: AD4ADRD; KA0403; TRN: US200615%%674
• Resource Relation: Conference: 7TH INTERNATIONAL CONF. ON ION SOURCES (ICIS 1997); TAORMINA, ITALY; 19970907 through 19970913
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ETCHING
FOCUSING
ION BEAMS
ION IMPLANTATION
ION SOURCES
MODIFICATIONS
PLASMA
WINDOWS