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Title: Fabrication of metallic microstructures by micromolding nanoparticles

Patent ·
OSTI ID:874844
 [1];  [2];  [3];  [4];  [5]
  1. Livermore, CA
  2. Goleta, CA
  3. Danville, CA
  4. Henrietta, NY
  5. Fremont, CA
+ Show Author Affiliations

A method is provided for fabricating metallic microstructures, i.e., microcomponents of micron or submicron dimensions. A molding composition is prepared containing an optional binder and nanometer size (1 to 1000 nm in diameter) metallic particles. A mold, such as a lithographically patterned mold, preferably a LIGA or a negative photoresist mold, is filled with the molding composition and compressed. The resulting microstructures are then removed from the mold and the resulting metallic microstructures so provided are then sintered.

Research Organization:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
DOE Contract Number:
AC04-94AL85000
Assignee:
Sandia Corporation (Livermore, CA)
Patent Number(s):
US 6472459
OSTI ID:
874844
Country of Publication:
United States
Language:
English

References (4)

Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process) journal May 1986
LIGA process: sensor construction techniques via X-ray lithography conference January 1988
Fabrication and testing of the planar magnetic micromotor journal September 1991
LIGA: metals, plastics, and ceramics conference August 1999

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Related Subjects

fabrication
metallic
microstructures
micromolding
nanoparticles
method
provided
fabricating
microcomponents
micron
submicron
dimensions
molding
composition
prepared
containing
optional
binder
nanometer
size
1000
nm
diameter
particles
mold
lithographically
patterned
liga
negative
photoresist
filled
compressed
resulting
removed
sintered
/524/419/