Surface--micromachined rotatable member having a low-contact-area hub

Patent · Tue Jan 01 00:00:00 EST 2002

OSTI ID:874505

Rodgers, M Steven ^[1]; Sniegowski, Jeffry J ^[2]

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1. Albuquerque, NM
2. Edgewood, NM

A surface-micromachined rotatable member formed on a substrate and a method for manufacturing thereof are disclosed. The surface-micromachined rotatable member, which can be a gear or a rotary stage, has a central hub, and an annulus connected to the central hub by an overarching bridge. The hub includes a stationary axle support attached to the substrate and surrounding an axle. The axle is retained within the axle support with an air-gap spacing therebetween of generally 0.3 .mu.m or less. The rotatable member can be formed by alternately depositing and patterning layers of a semiconductor (e.g. polysilicon or a silicon-germanium alloy) and a sacrificial material and then removing the sacrificial material, at least in part. The present invention has applications for forming micromechanical or microelectromechanical devices requiring lower actuation forces, and providing improved reliability.

• Research Organization: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
• DOE Contract Number: AC04-94AL85000
• Assignee: Sandia Corporation (Albuquerque, NM)
• Patent Number(s): US 6402969
• OSTI ID: 874505
• Country of Publication: United States
• Language: English

Related Subjects

surface-micromachined
rotatable
low-contact-area
hub
formed
substrate
method
manufacturing
disclosed
gear
rotary
stage
central
annulus
connected
overarching
bridge
stationary
axle
support
attached
surrounding
retained
air-gap
spacing
therebetween
03
mum
alternately
depositing
patterning
layers
semiconductor
polysilicon
silicon-germanium
alloy
sacrificial
material
removing
applications
forming
micromechanical
microelectromechanical
devices
requiring
actuation
forces
providing
improved
reliability
/216/74/438/