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Title: Surface-micromachined rotatable member having a low-contact-area hub

Abstract

A surface-micromachined rotatable member formed on a substrate and a method for manufacturing thereof are disclosed. The surface-micromachined rotatable member, which can be a gear or a rotary stage, has a central hub, and an annulus connected to the central hub by an overarching bridge. The hub includes a stationary axle support attached to the substrate and surrounding an axle. The axle is retained within the axle support with an air-gap spacing therebetween of generally 0.3 .mu.m or less. The rotatable member can be formed by alternately depositing and patterning layers of a semiconductor (e.g. polysilicon or a silicon-germanium alloy) and a sacrificial material and then removing the sacrificial material, at least in part. The present invention has applications for forming micromechanical or microelectromechanical devices requiring lower actuation forces, and providing improved reliability.

Inventors:
; ;
Publication Date:
Research Org.:
Sandia National Lab. (SNL-CA), Livermore, CA (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1174589
Patent Number(s):
6,649,947
Application Number:
10/098,214
Assignee:
Sandia Corporation (Albuquerque, NM) SNL-L
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Patent
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING

Citation Formats

Rodgers, M. Steven, Sniegowski, Jeffry J., and Krygowski, Thomas W.. Surface-micromachined rotatable member having a low-contact-area hub. United States: N. p., 2003. Web.
Rodgers, M. Steven, Sniegowski, Jeffry J., & Krygowski, Thomas W.. Surface-micromachined rotatable member having a low-contact-area hub. United States.
Rodgers, M. Steven, Sniegowski, Jeffry J., and Krygowski, Thomas W.. Tue . "Surface-micromachined rotatable member having a low-contact-area hub". United States. https://www.osti.gov/servlets/purl/1174589.
@article{osti_1174589,
title = {Surface-micromachined rotatable member having a low-contact-area hub},
author = {Rodgers, M. Steven and Sniegowski, Jeffry J. and Krygowski, Thomas W.},
abstractNote = {A surface-micromachined rotatable member formed on a substrate and a method for manufacturing thereof are disclosed. The surface-micromachined rotatable member, which can be a gear or a rotary stage, has a central hub, and an annulus connected to the central hub by an overarching bridge. The hub includes a stationary axle support attached to the substrate and surrounding an axle. The axle is retained within the axle support with an air-gap spacing therebetween of generally 0.3 .mu.m or less. The rotatable member can be formed by alternately depositing and patterning layers of a semiconductor (e.g. polysilicon or a silicon-germanium alloy) and a sacrificial material and then removing the sacrificial material, at least in part. The present invention has applications for forming micromechanical or microelectromechanical devices requiring lower actuation forces, and providing improved reliability.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Nov 18 00:00:00 EST 2003},
month = {Tue Nov 18 00:00:00 EST 2003}
}

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