Method of varying a characteristic of an optical vertical cavity structure formed by metalorganic vapor phase epitaxy

Patent · Mon Jan 01 00:00:00 EST 2001

OSTI ID:873844

Hou, Hong Q ^[1]; Coltrin, Michael E ^[1]; Choquette, Kent D ^[1]

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1. Albuquerque, NM

A process for forming an array of vertical cavity optical resonant structures wherein the structures in the array have different detection or emission wavelengths. The process uses selective area growth (SAG) in conjunction with annular masks of differing dimensions to control the thickness and chemical composition of the materials in the optical cavities in conjunction with a metalorganic vapor phase epitaxy (MOVPE) process to build these arrays.

• Research Organization: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
• DOE Contract Number: AC04-94AL85000
• Assignee: Sandia Corporation (Albuquerque, NM)
• Patent Number(s): US 6258615
• OSTI ID: 873844
• Country of Publication: United States
• Language: English

Related Subjects

method
varying
characteristic
optical
vertical
cavity
structure
formed
metalorganic
vapor
phase
epitaxy
process
forming
array
resonant
structures
detection
emission
wavelengths
selective
growth
sag
conjunction
annular
masks
differing
dimensions
control
thickness
chemical
composition
materials
cavities
movpe
build
arrays
chemical composition
structure formed
vapor phase
phase epitaxy
vertical cavity
organic vapor
cavity structure
optical resonant
resonant structure
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