Thermophoretic vacuum wand

Patent · Sat Jan 01 00:00:00 EST 2000

OSTI ID:873027

Klebanoff, Leonard Elliott ^[1]; Rader, Daniel John ^[2]

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1. San Ramon, CA
2. Lafayette, CA

A thermophoretic vacuum wand that is particularly suited for transporting articles in a cleanroom environment so that potential particle contaminants in the air do not become adhered to the surface of the article is described. The wand includes a housing having a platen with a front surface with suction port(s) through the platen; a vacuum source for applying a negative pressure to the suction port(s); and heating device for the object. Heating the article when it is held by the vacuum wand affords thermophoretic protection that effectively prevents particles in the air from depositing onto the article.

• Research Organization: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
• DOE Contract Number: AC04-94AL85000
• Assignee: EUV LLC (Santa Clara, CA)
• Patent Number(s): US 6072157
• OSTI ID: 873027
• Country of Publication: United States
• Language: English

Related Subjects

thermophoretic
vacuum
wand
particularly
suited
transporting
articles
cleanroom
environment
potential
particle
contaminants
air
adhered
surface
article
described
housing
platen
front
suction
source
applying
negative
pressure
heating
device
held
affords
protection
effectively
prevents
particles
depositing
vacuum wand
heating device
particularly suited
front surface
negative pressure
thermophoretic vacuum
vacuum source
cleanroom environment
particle contaminants
effectively prevents
transporting articles
potential particle
/219/269/279/294/