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U.S. Department of Energy
Office of Scientific and Technical Information

Thermophoretic vacuum wand

Patent ·
OSTI ID:20075859

A thermophoretic vacuum wand that is particularly suited for transporting articles in a cleanroom environment so that potential particle contaminants in the air do not become adhered to the surface of the article is described. The wand includes a housing having a platen with a front surface with suction port(s) through the platen; a vacuum source for applying a negative pressure to the suction port(s); and heating device for the object. Heating the article when it is held by the vacuum wand affords thermophoretic protection that effectively prevents particles in the air from depositing onto the article.

Sponsoring Organization:
US Department of Energy
DOE Contract Number:
AC04-94AL85000
OSTI ID:
20075859
Country of Publication:
United States
Language:
English

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