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Thermophoretic vacuum wand

Patent ·
OSTI ID:873027
 [1];  [2]
  1. San Ramon, CA
  2. Lafayette, CA
+ Show Author Affiliations

A thermophoretic vacuum wand that is particularly suited for transporting articles in a cleanroom environment so that potential particle contaminants in the air do not become adhered to the surface of the article is described. The wand includes a housing having a platen with a front surface with suction port(s) through the platen; a vacuum source for applying a negative pressure to the suction port(s); and heating device for the object. Heating the article when it is held by the vacuum wand affords thermophoretic protection that effectively prevents particles in the air from depositing onto the article.

Research Organization:
SANDIA CORP
DOE Contract Number:
AC04-94AL85000
Assignee:
EUV LLC (Santa Clara, CA)
Patent Number(s):
US 6072157
OSTI ID:
873027
Country of Publication:
United States
Language:
English

References (1)

Particle deposition from a natural convection flow onto a vertical isothermal flat plate journal August 1987

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