Micromachined electrostatic vertical actuator

Patent · Tue Oct 19 00:00:00 EDT 1999

OSTI ID:872600

Lee, Abraham P ^[1]; Sommargren, Gary E ^[2]; McConaghy, Charles F ^[3]; Krulevitch, Peter A ^[4]

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1. Walnut Creek, CA
2. Santa Cruz, CA
3. Livermore, CA
4. Pleasanton, CA

A micromachined vertical actuator utilizing a levitational force, such as in electrostatic comb drives, provides vertical actuation that is relatively linear in actuation for control, and can be readily combined with parallel plate capacitive position sensing for position control. The micromachined electrostatic vertical actuator provides accurate movement in the sub-micron to micron ranges which is desirable in the phase modulation instrument, such as optical phase shifting. For example, compact, inexpensive, and position controllable micromirrors utilizing an electrostatic vertical actuator can replace the large, expensive, and difficult-to-maintain piezoelectric actuators. A thirty pound piezoelectric actuator with corner cube reflectors, as utilized in a phase shifting diffraction interferometer can be replaced with a micromirror and a lens. For any very precise and small amplitudes of motion` micromachined electrostatic actuation may be used because it is the most compact in size, with low power consumption and has more straightforward sensing and control options.

• Research Organization: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
• DOE Contract Number: W-7405-ENG-48
• Assignee: Regents of University of California (Oakland, CA)
• Patent Number(s): US 5969848
• Application Number: 08/888000
• OSTI ID: 872600
• Country of Publication: United States
• Language: English

Related Subjects

micromachined
electrostatic
vertical
actuator
utilizing
levitational
force
comb
drives
provides
actuation
relatively
linear
control
readily
combined
parallel
plate
capacitive
position
sensing
accurate
movement
sub-micron
micron
ranges
desirable
phase
modulation
instrument
optical
shifting
example
compact
inexpensive
controllable
micromirrors
replace
expensive
difficult-to-maintain
piezoelectric
actuators
thirty
pound
corner
cube
reflectors
utilized
diffraction
interferometer
replaced
micromirror
lens
precise
amplitudes
motion
size
power
consumption
straightforward
options
position sensing
optical phase
electrostatic comb
provides accurate
diffraction interferometer
power consumption
phase shifting
phase shift
phase modulation
position control
parallel plate
vertical actuator
provides vertical
shifting diffraction
micron range
vertical actuation
actuator utilizing
corner cube
/359/73/250/310/361/