Method of depositing multi-layer carbon-based coatings for field emission
- Albuquerque, NM
A novel field emitter device for cold cathode field emission applications, comprising a multi-layer resistive carbon film. The multi-layered film of the present invention is comprised of at least two layers of a resistive carbon material, preferably amorphous-tetrahedrally coordinated carbon, such that the resistivities of adjacent layers differ. For electron emission from the surface, the preferred structure comprises a top layer having a lower resistivity than the bottom layer. For edge emitting structures, the preferred structure of the film comprises a plurality of carbon layers, wherein adjacent layers have different resistivities. Through selection of deposition conditions, including the energy of the depositing carbon species, the presence or absence of certain elements such as H, N, inert gases or boron, carbon layers having desired resistivities can be produced. Field emitters made according the present invention display improved electron emission characteristics in comparison to conventional field emitter materials.
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- DOE Contract Number:
- AC04-94AL85000
- Assignee:
- Sandia Corporation (Livermore, CA)
- Patent Number(s):
- US 5935639
- OSTI ID:
- 872437
- Country of Publication:
- United States
- Language:
- English
Diamondālike carbon films prepared with a laser ion source
|
journal | July 1988 |
Electron emission from chemical vapor deposited diamond and dielectric breakdown
|
journal | August 1994 |
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Multi-layer carbon-based coatings for field emission
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depositing
multi-layer
carbon-based
coatings
field
emission
novel
emitter
device
cold
cathode
applications
comprising
resistive
carbon
film
multi-layered
comprised
layers
material
preferably
amorphous-tetrahedrally
coordinated
resistivities
adjacent
electron
surface
preferred
structure
comprises
top
layer
resistivity
bottom
edge
emitting
structures
plurality
selection
deposition
conditions
including
energy
species
presence
absence
elements
inert
gases
boron
desired
produced
emitters
according
display
improved
characteristics
comparison
conventional
materials
inert gases
emitter material
electron emission
cold cathode
top layer
inert gas
field emission
carbon film
field emitter
carbon layer
film comprises
field emitters
carbon material
adjacent layers
structure comprises
resistive carbon
depositing carbon
carbon species
multi-layered film
multi-layer resistive
multi-layer carbon-based
novel field
cathode field
emission characteristics
deposition conditions
improved electron
emitter materials
emitter device
emission applications
carbon-based coatings
coordinated carbon
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