Fluidized bed deposition of diamond
Patent
·
OSTI ID:871725
- Los Alamos, NM
- Santa Fe, NM
A process for coating a substrate with diamond or diamond-like material including maintaining a substrate within a bed of particles capable of being fluidized, the particles having substantially uniform dimensions and the substrate characterized as having different dimensions than the bed particles, fluidizing the bed of particles, and depositing a coating of diamond or diamond-like material upon the substrate by chemical vapor deposition of a carbon-containing precursor gas mixture, the precursor gas mixture introduced into the fluidized bed under conditions resulting in excitation mechanisms sufficient to form the diamond coating.
- Research Organization:
- Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)
- Assignee:
- Regents of University of California, Office of Technology (Alameda, CA)
- Patent Number(s):
- US 5783335
- OSTI ID:
- 871725
- Country of Publication:
- United States
- Language:
- English
Low-Pressure, Metastable Growth of Diamond and "Diamondlike" Phases
|
journal | August 1988 |
Diamond and diamond-like carbon
|
journal | January 1991 |
Plasma Nitriding of Titanium Particles in a Fluidized Bed Reactor at a Reduced Pressure
|
journal | May 1990 |
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Related Subjects
fluidized
bed
deposition
diamond
process
coating
substrate
diamond-like
material
including
maintaining
particles
capable
substantially
uniform
dimensions
characterized
fluidizing
depositing
chemical
vapor
carbon-containing
precursor
gas
mixture
introduced
conditions
resulting
excitation
mechanisms
sufficient
form
bed particles
diamond coating
chemical vapor
fluidized bed
vapor deposition
substantially uniform
gas mixture
material including
substrate characterized
diamond-like material
conditions resulting
particles capable
including maintaining
/427/423/
bed
deposition
diamond
process
coating
substrate
diamond-like
material
including
maintaining
particles
capable
substantially
uniform
dimensions
characterized
fluidizing
depositing
chemical
vapor
carbon-containing
precursor
gas
mixture
introduced
conditions
resulting
excitation
mechanisms
sufficient
form
bed particles
diamond coating
chemical vapor
fluidized bed
vapor deposition
substantially uniform
gas mixture
material including
substrate characterized
diamond-like material
conditions resulting
particles capable
including maintaining
/427/423/