Low pass filter for plasma discharge

Patent · Sat Jan 01 00:00:00 EST 1994

OSTI ID:869236

Miller, Paul A ^[1]

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1. Albuquerque, NM

An isolator is disposed between a plasma reactor and its electrical energy source in order to isolate the reactor from the electrical energy source. The isolator operates as a filter to attenuate the transmission of harmonics of a fundamental frequency of the electrical energy source generated by the reactor from interacting with the energy source. By preventing harmonic interaction with the energy source, plasma conditions can be readily reproduced independent of the electrical characteristics of the electrical energy source and/or its associated coupling network.

• Research Organization: Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
• DOE Contract Number: FI04-89AL58872
• Assignee: Sematech, Inc. (Austin, TX)
• Patent Number(s): US 5302882
• OSTI ID: 869236
• Country of Publication: United States
• Language: English

Related Subjects

pass
filter
plasma
discharge
isolator
disposed
reactor
electrical
energy
source
isolate
operates
attenuate
transmission
harmonics
fundamental
frequency
generated
interacting
preventing
harmonic
interaction
conditions
readily
reproduced
independent
characteristics
associated
coupling
network
fundamental frequency
plasma discharge
electrical energy
energy source
electrical characteristics
plasma reactor
pass filter
plasma conditions
electrical characteristic
source generate
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