Electrical isolation of RF plasma discharges

Journal Article · Mon Nov 30 23:00:00 EST 1992 · Bulletin of the American Physical Society

OSTI ID:127909

Miller, P A ^[1]; Anderson, H; Splichal, M P ^[2]

---

1. Sandia National Lab., Albuquerque, NM (United States)
2. Univ. of New Mexico, Albuquerque, NM (United States)

Plasmas excited by radio-frequency (rf) power have nonlinear impedance characteristics. This causes the plasma state to depend on the nature of the circuitry that supplies electrical power to the plasma. This dependency occurs because the harmonics of the drive frequency, which are generated by the plasma nonlinearity, interact with the impedance of the external circuitry at the harmonic frequencies. The authors describe the use of a low-pass rf filter in the power feed to the plasma in the GEC RF Reference Cell. The filter successfully isolates the plasma and eliminates its sensitivity to changes in the rf generator, cable plant, and matching network.

• OSTI ID: 127909
• Report Number(s): CONF-920376--; CNN: Contract DE-F104-89AL588772; Contract 88-MC-502
• Journal Information: Bulletin of the American Physical Society, Journal Name: Bulletin of the American Physical Society Journal Issue: 9 Vol. 37; ISSN BAPSA6; ISSN 0003-0503
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
ELECTRIC IMPEDANCE
HIGH-FREQUENCY DISCHARGES
NONLINEAR PROBLEMS
PLASMA
RF SYSTEMS