Apparatus for coating a surface with a metal utilizing a plasma source

Patent · Tue Jan 01 00:00:00 EST 1991

OSTI ID:867803

Brown, Ian G ^[1]; MacGill, Robert A ^[2]; Galvin, James E ^[3]

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1. Berkeley, CA
2. Richmond, CA
3. Emeryville, CA

An apparatus and method for coating or layering a surface with a metal utilizing a metal vapor vacuum arc plasma source. The apparatus includes a trigger mechanism for actuating the metal vacuum vapor arc plasma source in a pulsed mode at a predetermined rate. The surface or substrate to be coated or layered is supported in position with the plasma source in a vacuum chamber. The surface is electrically biased for a selected period of time during the pulsed mode of operation of the plasma source. Both the pulsing of the metal vapor vacuum arc plasma source and the electrical biasing of the surface are synchronized for selected periods of time.

• Research Organization: Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)
• DOE Contract Number: AC03-76SF00098
• Assignee: University of California (Berkeley, CA)
• Patent Number(s): US 5013578
• OSTI ID: 867803
• Country of Publication: United States
• Language: English

Related Subjects

apparatus
coating
surface
metal
utilizing
plasma
source
method
layering
vapor
vacuum
trigger
mechanism
actuating
pulsed
mode
predetermined
rate
substrate
coated
layered
supported
position
chamber
electrically
biased
selected
period
time
operation
pulsing
electrical
biasing
synchronized
periods
pulsed mode
electrical bias
metal vapor
plasma source
vacuum chamber
predetermined rate
trigger mechanism
vacuum vapor
vapor vacuum
selected period
metal vacuum
metal utilizing
electrically biased
electrical biasing
/427/118/204/