Apparatus for coating a surface with a metal utilizing a plasma source

Patent · Tue May 07 00:00:00 EDT 1991

OSTI ID:7029710

Brown, I G; MacGill, R A; Galvin, J E

An apparatus and method are disclosed for coating or layering a surface with a metal utilizing a metal vapor vacuum arc plasma source. The apparatus includes a trigger mechanism for actuating the metal vacuum vapor arc plasma source in a pulsed mode at a predetermined rate. The surface or substrate to be coated or layered is supported in position with the plasma source in a vacuum chamber. The surface is electrically biased for a selected period of time during the pulsed mode of operation of the plasma source. Both the pulsing of the metal vapor vacuum arc plasma source and the electrical biasing of the surface are synchronized for selected periods of time. 10 figures.

• DOE Contract Number: AC03-76SF00098
• Assignee: University of California, Berkeley, CA (United States)
• Patent Number(s): US 5013578; A
• Application Number: PPN: US 7-448379
• OSTI ID: 7029710
• Resource Relation: Patent File Date: 11 Dec 1989
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
METALS
VACUUM COATING
MATERIALS HANDLING EQUIPMENT
PLASMA PRODUCTION
VACUUM SYSTEMS
DEPOSITION
ELEMENTS
EQUIPMENT
SURFACE COATING
360101* - Metals & Alloys- Preparation & Fabrication