Origin of the Time-Dependence of Wet Oxidation of AlGaAs

Journal Article · Mon Feb 15 00:00:00 EST 1999 · Applied Physics Letters

OSTI ID:3596

Allerman, A A; Ashby, C I.H.; Bridges, M M; Hammons, B E; Hou, H Q

The time-dependence of the wet oxidation of high-Al-content AlGaAs can be either linear, indicating reaction-rate limitation, or parabolic, indicating diffusion-limited rates. The transition from linear to parabolic time dependence can be explained by the increased rate of the formation of intermediate As{sub 2}O{sub 3} vs. its reduction to elemental As. A steadily increasing thickness of the As{sub 2}O{sub 3}-containing region at the oxidation front will shift the process from the linear to the parabolic regime. This shift from reaction-rate-limited (linear) to diffusion-limited (parabolic) time dependence is favored by increasing temperature or increasing Al mole fraction.

• Research Organization: Sandia National Lab. (SNL-NM), Albuquerque, NM (United States); Sandia National Lab. (SNL-CA), Livermore, CA (United States)
• Sponsoring Organization: US Department of Energy (US)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 3596
• Report Number(s): SAND99-0390J; TRN: AH200112%%347
• Journal Information: Applied Physics Letters, Other Information: Submitted to Applied Physics Letters; PBD: 15 Feb 1999
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
OXIDATION
CHEMICAL REACTION KINETICS
TIME DEPENDENCE
ALUMINIUM ARSENIDES
GALLIUM ARSENIDES
ARSENIC OXIDES
REDUCTION