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Title: Origin of the time dependence of wet oxidation of AlGaAs

Abstract

The time dependence of the wet oxidation of high-Al-content AlGaAs can be either linear, indicating reaction-rate limitation, or parabolic, indicating diffusion-limited rates. The transition from linear to parabolic time dependence can be explained by the increased rate of the formation of intermediate As{sub 2}O{sub 3} versus its reduction to elemental As. A steadily increasing thickness of the As{sub 2}O{sub 3}-containing region at the oxidation front will shift the process from the linear to the parabolic regime. This shift from reaction-rate limited (linear) to diffusion-limited (parabolic) time dependence is favored by increasing temperature or increasing Al mole fraction. {copyright} {ital 1999 American Institute of Physics.}

Authors:
; ; ; ;  [1]
  1. Sandia National Laboratories, Albuquerque, New Mexico 87185-0603 (United States)
Publication Date:
OSTI Identifier:
349331
Resource Type:
Journal Article
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 75; Journal Issue: 1; Other Information: PBD: Jul 1999
Country of Publication:
United States
Language:
English
Subject:
40 CHEMISTRY; ALUMINIUM COMPOUNDS; OXIDATION; ALUMINIUM ARSENIDES; GALLIUM ARSENIDES; WET OXIDATION PROCESSES; TIME DEPENDENCE; LASER MATERIALS; RAMAN SPECTRA; SPECTRAL SHIFT

Citation Formats

Ashby, C I, Bridges, M M, Allerman, A A, Hammons, B E, and Hou, H Q. Origin of the time dependence of wet oxidation of AlGaAs. United States: N. p., 1999. Web. doi:10.1063/1.124280.
Ashby, C I, Bridges, M M, Allerman, A A, Hammons, B E, & Hou, H Q. Origin of the time dependence of wet oxidation of AlGaAs. United States. https://doi.org/10.1063/1.124280
Ashby, C I, Bridges, M M, Allerman, A A, Hammons, B E, and Hou, H Q. 1999. "Origin of the time dependence of wet oxidation of AlGaAs". United States. https://doi.org/10.1063/1.124280.
@article{osti_349331,
title = {Origin of the time dependence of wet oxidation of AlGaAs},
author = {Ashby, C I and Bridges, M M and Allerman, A A and Hammons, B E and Hou, H Q},
abstractNote = {The time dependence of the wet oxidation of high-Al-content AlGaAs can be either linear, indicating reaction-rate limitation, or parabolic, indicating diffusion-limited rates. The transition from linear to parabolic time dependence can be explained by the increased rate of the formation of intermediate As{sub 2}O{sub 3} versus its reduction to elemental As. A steadily increasing thickness of the As{sub 2}O{sub 3}-containing region at the oxidation front will shift the process from the linear to the parabolic regime. This shift from reaction-rate limited (linear) to diffusion-limited (parabolic) time dependence is favored by increasing temperature or increasing Al mole fraction. {copyright} {ital 1999 American Institute of Physics.}},
doi = {10.1063/1.124280},
url = {https://www.osti.gov/biblio/349331}, journal = {Applied Physics Letters},
number = 1,
volume = 75,
place = {United States},
year = {Thu Jul 01 00:00:00 EDT 1999},
month = {Thu Jul 01 00:00:00 EDT 1999}
}