Arbitrary electron dose waveforms for electron microscopy

Bloom, Ruth Shewmon; Reed, Bryan Walter; Masiel, Daniel Joseph; Park, Sang Tae

Title: Arbitrary electron dose waveforms for electron microscopy

Patent · Tue Oct 18 00:00:00 EDT 2022

OSTI ID:1986717

Bloom, Ruth Shewmon; Reed, Bryan Walter; Masiel, Daniel Joseph; Park, Sang Tae

A device may include an electron source, a detector, and a deflector. The electron source may be directed toward a sample area. The detector may receive an electron signal or an electron-induced signal. A deflector may be positioned between the electron source and the sample. The deflector may modulate an intensity of the electron source directed to the sample area according to an electron dose waveform having a continuously variable temporal profile.

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Research Organization:: Integrated Dynamic Electron Solutions, Inc., Pleasanton, CA (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: SC0013104

Assignee:: Integrated Dynamic Electron Solutions, Inc. (Pleasanton, CA)

Patent Number(s):: 11,476,082

Application Number:: 17/688,339

OSTI ID:: 1986717

Resource Relation:: Patent File Date: 03/07/2022

Country of Publication:: United States

Language:: English

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