Facile fabrication of 2D material multilayers and vdW heterostructures with multimodal microscopy and AFM characterization

Dong, Siyan; Zhang, Xiang; Nathamgari, S. Shiva. P.; Krayev, Andrey; Zhang, Xu; Hwang, Jin Wook; Ajayan, Pulickel M.; Espinosa, Horacio D.

doi:10.1016/j.mattod.2022.01.002

Title: Facile fabrication of 2D material multilayers and vdW heterostructures with multimodal microscopy and AFM characterization

Journal Article · Wed Jan 26 00:00:00 EST 2022 · Materials Today

DOI:https://doi.org/10.1016/j.mattod.2022.01.002· OSTI ID:1981705

Dong, Siyan ^[1]; Zhang, Xiang ^[2]; Nathamgari, S. Shiva. P. ^[1]; Krayev, Andrey ^[3]; Zhang, Xu ^[1]; Hwang, Jin Wook ^[1]; Ajayan, Pulickel M. ^[2]; Espinosa, Horacio D. ^[1]

Northwestern University, Evanston, IL (United States)
Rice University, Houston, TX (United States)
Horiba Scientific, Novato, CA (United States)

Reliable transfer processes that enable manipulation of two-dimensional (2D) materials, e.g., transition metal dichalcogenides (TMDCs) and MXenes, from one substrate to another has been a necessity for successful device fabrication. Here, with both mechanical exfoliation and chemical vapor deposition (CVD) widely used, a versatile, clean, deterministic, and yet simple transfer technique is highly needed. To address such need, we developed a transfer method that takes advantage of wettability contrast between interfaces without the use of sacrificial layers or chemical processes. More importantly, a setup was developed to carry out this transfer method with high sample selectivity and fine control of the position and orientation of transferred TMDC crystals, a feature required for fabrication of the devices based on vertical 2D heterostructures. Using both exfoliated and CVD grown materials and subsequent atomic force microscopy (AFM), photoluminescence (PL), confocal Raman and tip enhanced Raman spectroscopy (TERS) characterization, we ascertained the quality of interfaces resulting from the transfer process while preserving excellent 2D material integrity. PL and TERS maps revealed nanometer-scale heterogeneities in the interfaces of fabricated heterostructures, which should enable further perfection of the transfer technique. TERS/TEPL information were employed to identify areas suitable for nanodevice fabrication, making the reported transfer and characterization methods ideal for making high quality assembly of 2D heterostructure more accessible, which should facilitate exploration of vertical 2D heterostructures for applications in electronics, batteries, solar cells, and twistronics.

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Research Organization:: Argonne National Laboratory (ANL), Argonne, IL (United States). Center for Nanoscale Materials (CNM)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES); Army Research Office (ARO)

Grant/Contract Number:: AC02-06CH11357; W911NF1510068

OSTI ID:: 1981705

Journal Information:: Materials Today, Vol. 52, Issue C; ISSN 1369-7021

Publisher:: ElsevierCopyright Statement

Country of Publication:: United States

Language:: English

References (54)

Solvatochromic Effect on the Photoluminescence of MoS₂Monolayers Mao, Nannan; Chen, Yanfeng; Liu, Dameng Small, Vol. 9, Issue 8 https://doi.org/10.1002/smll.201202982	journal	February 2013
Fully dry PMMA transfer of graphene on h -BN using a heating/cooling system Uwanno, T.; Hattori, Y.; Taniguchi, T. 2D Materials, Vol. 2, Issue 4 https://doi.org/10.1088/2053-1583/2/4/041002	journal	November 2015
High-quality and efficient transfer of large-area graphene films onto different substrates Chen, Xu-Dong; Liu, Zhi-Bo; Zheng, Chao-Yi Carbon, Vol. 56 https://doi.org/10.1016/j.carbon.2013.01.011	journal	May 2013
Recent progress in the assembly of nanodevices and van der Waals heterostructures by deterministic placement of 2D materials Frisenda, Riccardo; Navarro-Moratalla, Efrén; Gant, Patricia Chemical Society Reviews, Vol. 47, Issue 1 https://doi.org/10.1039/C7CS00556C	journal	January 2018
Unconventional superconductivity in magic-angle graphene superlattices Cao, Yuan; Fatemi, Valla; Fang, Shiang Nature, Vol. 556, Issue 7699 https://doi.org/10.1038/nature26160	journal	March 2018
Temperature-Dependent Wettability on Silicon Dioxide and Silicon Nitride Substrates Desai, Salil; Kaware, Ravindra D.; Rodrigues, Jhonatam Journal of Nanoengineering and Nanomanufacturing, Vol. 4, Issue 3 https://doi.org/10.1166/jnan.2014.1198	journal	September 2014
Emerging Photoluminescence in Monolayer MoS₂ Splendiani, Andrea; Sun, Liang; Zhang, Yuanbo Nano Letters, Vol. 10, Issue 4, p. 1271-1275 https://doi.org/10.1021/nl903868w	journal	April 2010
Minimizing residues and strain in 2D materials transferred from PDMS Jain, Achint; Bharadwaj, Palash; Heeg, Sebastian Nanotechnology, Vol. 29, Issue 26 https://doi.org/10.1088/1361-6528/aabd90	journal	May 2018
Graphene Based Electrochemical Sensors and Biosensors: A Review Shao, Yuyan; Wang, Jun; Wu, Hong Electroanalysis, Vol. 22, Issue 10, p. 1027-1036 https://doi.org/10.1002/elan.200900571	journal	March 2010
Preparation of Twisted Bilayer Graphene via the Wetting Transfer Method Hou, Yuan; Ren, Xibiao; Fan, Jingcun ACS Applied Materials & Interfaces, Vol. 12, Issue 36 https://doi.org/10.1021/acsami.0c12000	journal	August 2020
2D materials and van der Waals heterostructures Novoselov, K. S.; Mishchenko, A.; Carvalho, A. Science, Vol. 353, Issue 6298 https://doi.org/10.1126/science.aac9439	journal	July 2016
Synthesis of Millimeter-Scale Transition Metal Dichalcogenides Single Crystals Gong, Yongji; Ye, Gonglan; Lei, Sidong Advanced Functional Materials, Vol. 26, Issue 12 https://doi.org/10.1002/adfm.201504633	journal	February 2016
Atomically Thin ${MoS}_{2}$ A New Direct-Gap Semiconductor Mak, Kin Fai; Lee, Changgu; Hone, James Physical Review Letters, Vol. 105, Issue 13, Article No.136805 https://doi.org/10.1103/PhysRevLett.105.136805	journal	September 2010
Observation of piezoelectricity in free-standing monolayer MoS2 Zhu, Hanyu; Wang, Yuan; Xiao, Jun Nature Nanotechnology, Vol. 10, Issue 2 https://doi.org/10.1038/nnano.2014.309	journal	December 2014
Single-Layer MoS₂ Phototransistors Yin, Zongyou; Li, Hai; Li, Hong ACS Nano, Vol. 6, Issue 1, p. 74-80 https://doi.org/10.1021/nn2024557	journal	December 2011
Deterministic transfer of two-dimensional materials by all-dry viscoelastic stamping Castellanos-Gomez, Andres; Buscema, Michele; Molenaar, Rianda 2D Materials, Vol. 1, Issue 1 https://doi.org/10.1088/2053-1583/1/1/011002	journal	April 2014
Breakdown of High-Performance Monolayer MoS ₂ Transistors Lembke, Dominik; Kis, Andras ACS Nano, Vol. 6, Issue 11 https://doi.org/10.1021/nn303772b	journal	October 2012
Boron nitride substrates for high-quality graphene electronics Dean, C. R.; Young, A. F.; Meric, I. Nature Nanotechnology, Vol. 5, Issue 10, p. 722-726 https://doi.org/10.1038/nnano.2010.172	journal	August 2010
Ultrahigh electron mobility in suspended graphene Bolotin, K. I.; Sikes, K. J.; Jiang, Z. Solid State Communications, Vol. 146, Issue 9-10, p. 351-355 https://doi.org/10.1016/j.ssc.2008.02.024	journal	June 2008
Erratum: Water-based Peeling of Thin Hydrophobic Films [Phys. Rev. Lett. 119 , 154502 (2017)] Khodaparast, Sepideh; Boulogne, François; Poulard, Christophe Physical Review Letters, Vol. 121, Issue 26 https://doi.org/10.1103/PhysRevLett.121.269901	journal	December 2018
Measurement of the Elastic Properties and Intrinsic Strength of Monolayer Graphene Lee, C.; Wei, X.; Kysar, J. W. Science, Vol. 321, Issue 5887, p. 385-388 https://doi.org/10.1126/science.1157996	journal	July 2008
Direct measurements of interfacial adhesion in 2D materials and van der Waals heterostructures in ambient air Rokni, Hossein; Lu, Wei Nature Communications, Vol. 11, Issue 1 https://doi.org/10.1038/s41467-020-19411-7	journal	November 2020
From Bulk to Monolayer MoS2: Evolution of Raman Scattering Li, Hong; Zhang, Qing; Yap, Chin Chong Ray Advanced Functional Materials, Vol. 22, Issue 7 https://doi.org/10.1002/adfm.201102111	journal	January 2012
Characterization of Thermally Grown SiO[sub 2] Surfaces by Contact Angle Measurements Frieser, R. G. Journal of The Electrochemical Society, Vol. 121, Issue 5 https://doi.org/10.1149/1.2401884	journal	January 1974
Nano-“Squeegee” for the Creation of Clean 2D Material Interfaces Rosenberger, Matthew R.; Chuang, Hsun-Jen; McCreary, Kathleen M. ACS Applied Materials & Interfaces, Vol. 10, Issue 12 https://doi.org/10.1021/acsami.8b01224	journal	March 2018
Thermally Driven Crossover from Indirect toward Direct Bandgap in 2D Semiconductors: MoSe₂ versus MoS₂ Tongay, Sefaattin; Zhou, Jian; Ataca, Can Nano Letters, Vol. 12, Issue 11, p. 5576-5580 https://doi.org/10.1021/nl302584w	journal	October 2012
Wafer-Scale Two-Dimensional MoS₂ Layers Integrated on Cellulose Substrates Toward Environmentally Friendly Transient Electronic Devices Yoo, Changhyeon; Kaium, Md Golam; Hurtado, Luis ACS Applied Materials & Interfaces, Vol. 12, Issue 22 https://doi.org/10.1021/acsami.0c06198	journal	May 2020
Intrinsic Piezoelectricity in Two-Dimensional Materials Duerloo, Karel-Alexander N.; Ong, Mitchell T.; Reed, Evan J. The Journal of Physical Chemistry Letters, Vol. 3, Issue 19 https://doi.org/10.1021/jz3012436	journal	September 2012
Photoluminescence emission and Raman response of monolayer MoS_2, MoSe_2, and WSe_2 Tonndorf, Philipp; Schmidt, Robert; Böttger, Philipp Optics Express, Vol. 21, Issue 4 https://doi.org/10.1364/OE.21.004908	journal	January 2013
Adhesion Energy of MoS ₂ Thin Films on Silicon-Based Substrates Determined via the Attributes of a Single MoS ₂ Wrinkle Deng, Shikai; Gao, Enlai; Xu, Zhiping ACS Applied Materials & Interfaces, Vol. 9, Issue 8 https://doi.org/10.1021/acsami.6b16175	journal	February 2017
Many-Body Complexes in 2D Semiconductors Pei, Jiajie; Yang, Jiong; Yildirim, Tanju Advanced Materials, Vol. 31, Issue 2 https://doi.org/10.1002/adma.201706945	journal	August 2018
Understanding the Intrinsic Water Wettability of Molybdenum Disulfide (MoS ₂ ) Kozbial, Andrew; Gong, Xiao; Liu, Haitao Langmuir, Vol. 31, Issue 30 https://doi.org/10.1021/acs.langmuir.5b02057	journal	July 2015
Layer-by-layer assembly of two-dimensional materials into wafer-scale heterostructures Kang, Kibum; Lee, Kan-Heng; Han, Yimo Nature, Vol. 550, Issue 7675 https://doi.org/10.1038/nature23905	journal	September 2017
Electric Field Effect in Atomically Thin Carbon Films Novoselov, K. S. Science, Vol. 306, Issue 5696, p. 666-669 https://doi.org/10.1126/science.1102896	journal	October 2004
Chemical vapour deposition and characterization of uniform bilayer and trilayer MoS ₂ crystals Zobel, Adam; Boson, Alex; Wilson, Peter M. Journal of Materials Chemistry C, Vol. 4, Issue 47 https://doi.org/10.1039/C6TC03587F	journal	January 2016
Toward Clean and Crackless Transfer of Graphene Liang, Xuelei; Sperling, Brent A.; Calizo, Irene ACS Nano, Vol. 5, Issue 11 https://doi.org/10.1021/nn203377t	journal	October 2011
High-speed residue-free transfer of two-dimensional materials using PDMS stamp and water infiltration Lee, Jun-Ho; Lee, Han-Byeol; Jeong, Nae Bong Current Applied Physics, Vol. 20, Issue 10 https://doi.org/10.1016/j.cap.2020.07.019	journal	October 2020
An Experimental Setup for Combined In-Vacuo Raman Spectroscopy and Cavity-Interferometry Measurements on TMDC Nano-resonators Nathamgari, S. S. P.; Dong, S.; Hosseinian, E. Experimental Mechanics, Vol. 59, Issue 3 https://doi.org/10.1007/s11340-018-00452-5	journal	November 2018
Emerging Device Applications for Semiconducting Two-Dimensional Transition Metal Dichalcogenides Jariwala, Deep; Sangwan, Vinod K.; Lauhon, Lincoln J. ACS Nano, Vol. 8, Issue 2 https://doi.org/10.1021/nn500064s	journal	January 2014
Highly Efficient and Air-Stable Infrared Photodetector Based on 2D Layered Graphene–Black Phosphorus Heterostructure Liu, Yan; Shivananju, Bannur Nanjunda; Wang, Yusheng ACS Applied Materials & Interfaces, Vol. 9, Issue 41 https://doi.org/10.1021/acsami.7b09889	journal	October 2017
Ultrafast charge transfer in atomically thin MoS2/WS2 heterostructures Hong, Xiaoping; Kim, Jonghwan; Shi, Su-Fei Nature Nanotechnology, Vol. 9, Issue 9 https://doi.org/10.1038/nnano.2014.167	journal	August 2014
Resonance effects in the Raman scattering of monolayer and few-layer ${MoSe}_{2}$ Soubelet, P.; Bruchhausen, A. E.; Fainstein, A. Physical Review B, Vol. 93, Issue 15 https://doi.org/10.1103/PhysRevB.93.155407	journal	April 2016
Nonlinear Mode Coupling and One-to-One Internal Resonances in a Monolayer WS₂ Nanoresonator Nathamgari, S. Shiva P.; Dong, Siyan; Medina, Lior Nano Letters, Vol. 19, Issue 6 https://doi.org/10.1021/acs.nanolett.9b01442	journal	May 2019
Recent developments in emerging two-dimensional materials and their applications Khan, Karim; Tareen, Ayesha Khan; Aslam, Muhammad Journal of Materials Chemistry C, Vol. 8, Issue 2 https://doi.org/10.1039/C9TC04187G	journal	January 2020
Surface-Energy-Assisted Perfect Transfer of Centimeter-Scale Monolayer and Few-Layer MoS ₂ Films onto Arbitrary Substrates Gurarslan, Alper; Yu, Yifei; Su, Liqin ACS Nano, Vol. 8, Issue 11 https://doi.org/10.1021/nn5057673	journal	November 2014
Universal Transfer and Stacking of Chemical Vapor Deposition Grown Two-Dimensional Atomic Layers with Water-Soluble Polymer Mediator Lu, Zhixing; Sun, Lifei; Xu, Guanchen ACS Nano, Vol. 10, Issue 5 https://doi.org/10.1021/acsnano.6b00961	journal	May 2016
Photoelectrochemical-type sunlight photodetector based on MoS ₂ /graphene heterostructure Huang, Zongyu; Han, Weijia; Tang, Hongli 2D Materials, Vol. 2, Issue 3 https://doi.org/10.1088/2053-1583/2/3/035011	journal	July 2015
Capillary-Force-Assisted Clean-Stamp Transfer of Two-Dimensional Materials Ma, Xuezhi; Liu, Qiushi; Xu, Da Nano Letters, Vol. 17, Issue 11 https://doi.org/10.1021/acs.nanolett.7b03449	journal	October 2017
A Universal, Rapid Method for Clean Transfer of Nanostructures onto Various Substrates Li, Hai; Wu, Jumiati; Huang, Xiao ACS Nano, Vol. 8, Issue 7 https://doi.org/10.1021/nn501779y	journal	June 2014
Automated Assembly of Wafer-Scale 2D TMD Heterostructures of Arbitrary Layer Orientation and Stacking Sequence Using Water Dissoluble Salt Substrates Han, Sang Sub; Ko, Tae-Jun; Yoo, Changhyeon Nano Letters, Vol. 20, Issue 5 https://doi.org/10.1021/acs.nanolett.0c01089	journal	April 2020
Reliable Exfoliation of Large-Area High-Quality Flakes of Graphene and Other Two-Dimensional Materials Huang, Yuan; Sutter, Eli; Shi, Norman N. ACS Nano, Vol. 9, Issue 11 https://doi.org/10.1021/acsnano.5b04258	journal	September 2015
Single-layer MoS₂ transistors Radisavljevic, B.; Radenovic, A.; Brivio, J. Nature Nanotechnology, Vol. 6, Issue 3, p. 147-150 https://doi.org/10.1038/nnano.2010.279	journal	January 2011
A transfer technique for high mobility graphene devices on commercially available hexagonal boron nitride Zomer, P. J.; Dash, S. P.; Tombros, N. Applied Physics Letters, Vol. 99, Issue 23 https://doi.org/10.1063/1.3665405	journal	December 2011
Direct Measurement of the Surface Energy of Graphene van Engers, Christian D.; Cousens, Nico E. A.; Babenko, Vitaliy Nano Letters, Vol. 17, Issue 6 https://doi.org/10.1021/acs.nanolett.7b01181	journal	May 2017

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36 MATERIALS SCIENCE
Materials Science
2D materials
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Van der Waals heterostructure
Tip-enhanced Raman spectroscopy

Title: Facile fabrication of 2D material multilayers and vdW heterostructures with multimodal microscopy and AFM characterization

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