Desorption characteristics of selenium and tellurium thin films

Liu, Derrick H.; Hilse, Maria; Engel-Herbert, Roman

doi:10.1116/6.0002013

Title: Desorption characteristics of selenium and tellurium thin films

Journal Article · Thu Sep 01 00:00:00 EDT 2022 · Journal of Vacuum Science and Technology A

DOI:https://doi.org/10.1116/6.0002013· OSTI ID:1980713

Liu, Derrick H. ^[1];

^[1]; Engel-Herbert, Roman ^[2]

Pennsylvania State Univ., University Park, PA (United States)
Pennsylvania State Univ., University Park, PA (United States); Leibniz Institut im Forschungsverbund, Berlin (Germany)

The temperature-dependent desorption behavior of selenium and tellurium is investigated using a heated quartz crystal microbalance. Prior to heating the quartz crystal microbalance, selenium and tellurium films with varying thickness were deposited using thermal effusion cells in a molecular beam epitaxy system for subsequent determination of temperature-dependent mass loss of the deposited films. The desorption rate for tellurium was found to exhibit one sharp peak around 190 °C, indicating the loss of the entire film irrespective of film thickness within a temperature window of 20 °C, which was completely evaporated at 200 °C. Similar experiments for selenium revealed that the thermal desorption took place via a two-stage process with a smaller portion of the material desorbing within an even narrower temperature window of 5 °C at a much lower peak temperature of 65 °C, while most selenium desorbed within a temperature range of 10 °C around 90 °C. This two-stage behavior indicated the presence of at least two chemically distinct selenium species or binding states. The direct and quantitative determination of the chalcogen desorption process provides important insights into the kinetics of chalcogenide-based film growth and is in addition of applied benefit to the research community in the area of Se/Te capping and decapping of air sensitive materials as it provides temperature ranges and rates at which full desorption is achieved. Our work furthermore points toward the need for a more detailed understanding of the chemical composition state of atomic and molecular beams supplied from thermal evaporation sources during growth.

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Research Organization:: Pennsylvania State Univ., University Park, PA (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES); National Science Foundation (NSF)

Grant/Contract Number:: SC0021118; DMR-1539916; DMR-2039351

OSTI ID:: 1980713

Alternate ID(s):: OSTI ID: 1885064

Journal Information:: Journal of Vacuum Science and Technology A, Vol. 40, Issue 5; ISSN 0734-2101

Publisher:: American Vacuum Society / AIPCopyright Statement

Country of Publication:: United States

Language:: English

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