Scaling Properties in Transistors That Use Aligned Arrays of Single-Walled Carbon Nanotubes
- Univ. of Illinois at Urbana-Champaign, IL (United States)
- Lehigh Univ., Bethlehem, PA (United States)
- Purdue Univ., West Lafayette, IN (United States)
Recent studies and device demonstrations indicate that horizontally aligned arrays of linearly configured single-walled carbon nanotubes (SWNTs) can serve as an effective thin film semiconductor material, suitable for scalable use in high-performance transistors. This paper presents the results of systematic investigations of the dependence of device properties on channel length, to reveal the role of channel and contact resistance in the operation. Here, the results indicate that, for the range of channel lengths and SWNT diameters studied here, source and drain contacts of Pd yield transistors with effectively Ohmic contacts that exhibit negligible dependence of their resistances on gate voltage. For devices that use Au, modulation of the resistance of the contacts represents a significant contribution to the response. Extracted values of the mobilities of the semiconducting SWNTs and the contact resistances associated with metallic and semiconducting SWNTs are consistent with previous reports on single tube test structures.
- Research Organization:
- Univ. of Illinois at Urbana-Champaign, IL (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC), Basic Energy Sciences (BES). Materials Sciences & Engineering Division
- Grant/Contract Number:
- FG02-07ER46471; FG02-07ER46453
- OSTI ID:
- 1876179
- Journal Information:
- Nano Letters, Vol. 10, Issue 2; ISSN 1530-6984
- Publisher:
- American Chemical SocietyCopyright Statement
- Country of Publication:
- United States
- Language:
- English
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