A surface acoustic wave hydrogen sensor with tin doped indium oxide layers for intermediate temperatures

Devkota, Jagannath; Mao, Elizabeth; Greve, David W.; Ohodnicki, Paul R.; Baltrus, John

doi:10.1016/j.snb.2021.131229

Title: A surface acoustic wave hydrogen sensor with tin doped indium oxide layers for intermediate temperatures

Journal Article · Thu Dec 09 00:00:00 EST 2021 · Sensors and Actuators. B, Chemical

DOI:https://doi.org/10.1016/j.snb.2021.131229· OSTI ID:1868089

Devkota, Jagannath ^[1]; Mao, Elizabeth ^[1]; Greve, David W. ^[2]; Ohodnicki, Paul R. ^[1]; Baltrus, John ^[1]

National Energy Technology Lab. (NETL), Pittsburgh, PA (United States)
Carnegie Mellon Univ., Pittsburgh, PA (United States); DWGreve Consulting, Sedona, AZ (United States)

We report high temperature surface acoustic wave (SAW) gas sensors with conducting sensing layers require tuning of the sheet conductivity for optimal response. Conducting metal oxides are attractive sensing materials for their tunable electronic properties and high thermal stability, amongst others. Here, we have investigated the application of indium oxide (IO) and indium tin oxide (ITO) films on langasite (LGS)-based SAW reflective delay line sensor devices for monitoring hydrogen at 350 °C. Specifically, we modeled the effect of the IO and ITO sensing layer thickness on the wave velocity, attenuation, and effective electromechanical coefficient. This was followed by an experimental demonstration of tuning of the ITO film sheet conductivity by controlling the dopant concentration and yielding an improvement in the sensor sensitivity. The current study provides a pathway towards the development of conductivity-based sensing layers for high temperature SAW gas sensors with improved sensitivity.

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Research Organization:: National Energy Technology Laboratory (NETL), Pittsburgh, PA, Morgantown, WV, and Albany, OR (United States)

Sponsoring Organization:: USDOE Office of Fossil Energy (FE)

Grant/Contract Number:: 89243318CFE000003

OSTI ID:: 1868089

Alternate ID(s):: OSTI ID: 1862438

Journal Information:: Sensors and Actuators. B, Chemical, Vol. 354, Issue None; ISSN 0925-4005

Publisher:: ElsevierCopyright Statement

Country of Publication:: United States

Language:: English

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