Surface Acoustic Wave H2 and O2 Sensors Based on Conducting Metal Oxides/Langasite for Elevated Temperature Applications - presentation

Conference · Mon Sep 07 04:00:00 EDT 2020

OSTI ID:1765708

Mao, Elizabeth; Devkota, Jagannath ^[1]; Baltrus, John ^[2]; Ohodnicki, Paul ^[2]; Chorpening, Benjamin ^[2]

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1. AECOM
2. NETL

<p style="text-align: justify;"><span style="font-family: Arial; font-size: 10pt;">• </span><span style="color: black; font-family: Arial; font-size: 10pt;">SAW reflective delay line devices were designed and successfully fabricated on Langasite by patterning platinum electrodes.</span><p style="text-align: justify;"><span style="font-family: Arial; font-size: 10pt;">• </span><span style="color: black; font-family: Arial; font-size: 10pt;">Fabricated devices successfully tested up to 500°C for temperature sensing applications.</span><p style="text-align: justify;"><span style="font-family: Arial; font-size: 10pt;">• </span><span style="color: black; font-family: Arial; font-size: 10pt;">Indium oxide (IO) and indium tin oxide (ITO) sensing layers were developed on the SAW devices using sputtering and sol-gel method.</span><p style="text-align: justify;"><span style="font-family: Arial; font-size: 10pt;">• </span><span style="color: black; font-family: Arial; font-size: 10pt;">IO- and ITO-functionalized langasite SAW reflective delay line devices were used for sensing H2 and O2 at 350°C. </span><br>

• Research Organization: National Energy Technology Laboratory (NETL), Pittsburgh, PA, Morgantown, WV, and Albany, OR (United States)
• Sponsoring Organization: USDOE Office of Fossil Energy (FE)
• OSTI ID: 1765708
• Report Number(s): DOE/NETL-2020/2144
• Country of Publication: United States
• Language: English