A micromirror array with annular partitioning for high-speed random-access axial focusing
[1];
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[4]
- The Univ. of California, Berkeley and Univ. of California, San Francisco Graduate Program in Bioengineering, Berkeley, CA (United States); Univ. of California, Berkeley, CA (United States). Dept. of Electrical Engineering & Computer Sciences
- Univ. of California, Berkeley, CA (United States). Dept. of Electrical Engineering & Computer Sciences
- Univ. of North Carolina, Chapel Hill, NC (United States). Dept. of Applied Physical Sciences
- The Univ. of California, Berkeley and Univ. of California, San Francisco Graduate Program in Bioengineering, Berkeley, CA (United States); Univ. of California, Berkeley, CA (United States). Dept. of Electrical Engineering & Computer Sciences; Chan Zuckerberg Biohub, San Francisco, CA (United States)
- National Inst. of Standards and Technology (NIST), Gaithersburg, MD (United States). Physical Measurement Lab.
Dynamic axial focusing functionality has recently experienced widespread incorporation in microscopy, augmented/virtual reality (AR/VR), adaptive optics and material processing. However, the limitations of existing varifocal tools continue to beset the performance capabilities and operating overhead of the optical systems that mobilize such functionality. The varifocal tools that are the least burdensome to operate (e.g. liquid crystal, elastomeric or optofluidic lenses) suffer from low (≈100 Hz) refresh rates. Conversely, the fastest devices sacrifice either critical capabilities such as their dwelling capacity (e.g. acoustic gradient lenses or monolithic micromechanical mirrors) or low operating overhead (e.g. deformable mirrors). Here, we present a general-purpose random-access axial focusing device that bridges these previously conflicting features of high speed, dwelling capacity and lightweight drive by employing low-rigidity micromirrors that exploit the robustness of defocusing phase profiles. Geometrically, the device consists of an 8.2 mm diameter array of piston-motion and 48-μm-pitch micromirror pixels that provide 2π phase shifting for wavelengths shorter than 1100 nm with 10–90% settling in 64.8 μs (i.e., 15.44 kHz refresh rate). The pixels are electrically partitioned into 32 rings for a driving scheme that enables phase-wrapped operation with circular symmetry and requires <30 V per channel. Optical experiments demonstrated the array’s wide focusing range with a measured ability to target 29 distinct resolvable depth planes. Overall, the features of the proposed array offer the potential for compact, straightforward methods of tackling bottlenecked applications, including high-throughput single-cell targeting in neurobiology and the delivery of dense 3D visual information in AR/VR.
- Research Organization:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC), Basic Energy Sciences (BES). Scientific User Facilities Division; Scientific Interface
- Grant/Contract Number:
- AC02-06CH11357; 5113244
- OSTI ID:
- 1816817
- Journal Information:
- Light, Science & Applications, Vol. 9, Issue 1; ISSN 2047-7538
- Publisher:
- Nature Publishing GroupCopyright Statement
- Country of Publication:
- United States
- Language:
- English
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