Superconductivity Behavior in Epitaxial TiN Films Points to Surface Magnetic Disorder

Saveskul, N. A.; Titova, N. A.; Baeva, E. M.; Semenov, A. V.; Lubenchenko, A. V.; Saha, S.; Reddy, H.; Bogdanov, S. I.; Marinero, E. E.; Shalaev, V. M.; Boltasseva, A.; Khrapai, V. S.; Kardakova, A. I.; Goltsman, G. N.

doi:10.1103/physrevapplied.12.054001

Title: Superconductivity Behavior in Epitaxial TiN Films Points to Surface Magnetic Disorder

Journal Article · Fri Nov 01 00:00:00 EDT 2019 · Physical Review Applied

DOI:https://doi.org/10.1103/physrevapplied.12.054001· OSTI ID:1803145

Saveskul, N. A. ^[1]; Titova, N. A. ^[1]; Baeva, E. M. ^[2]; Semenov, A. V. ^[1]; Lubenchenko, A. V. ^[3]; Saha, S. ^[4]; Reddy, H. ^[4]; Bogdanov, S. I. ^[4]; Marinero, E. E. ^[4]; Shalaev, V. M. ^[4]; Boltasseva, A. ^[4]; Khrapai, V. S. ^[5];

^[2]; Goltsman, G. N. ^[2]

Moscow State University of Education (Russia)
Moscow State University of Education (Russia); National Research University Higher School of Economics, Moscow (Russia)
National Research University MPEI, Moscow (Russia)
Purdue Univ., West Lafayette, IN (United States)
Moscow State University of Education (Russia); National Research University Higher School of Economics, Moscow (Russia); Institute of Solid State Physics, Chernogolovka (Russia)

In this work we analyze the evolution of the normal and superconducting properties of epitaxial TiN films, characterized by high Ioffe-Regel parameter values, as a function of the film thickness. As the film thickness decreases, we observe an increase of the residual resistivity, that becomes dominated by diffusive surface scattering for d ≤ 20 nm . At the same time, a substantial thickness-dependent reduction of the superconducting critical temperature is observed compared to the bulk TiN value. In such high-quality material films, this effect can be explained by a weak magnetic disorder residing in the surface layer with a characteristic magnetic defect density of approximately 10¹² cm^–2. Our results suggest that surface magnetic disorder is generally present in oxidized TiN films.

View Accepted Manuscript (DOE)

Cite

Export

Save

Research Organization:: Purdue Univ., West Lafayette, IN (United States)

Sponsoring Organization:: USDOE Office of Science (SC), Basic Energy Sciences (BES). Materials Sciences & Engineering Division; Russian Science Foundation (RSF); Russian Foundation for Basic Research (RFBR)

Grant/Contract Number:: SC0017717; MK-1308.2019.2

OSTI ID:: 1803145

Journal Information:: Physical Review Applied, Vol. 12, Issue 5; ISSN 2331-7019

Publisher:: American Physical Society (APS)Copyright Statement

Country of Publication:: United States

Language:: English

References (66)

Low loss superconducting titanium nitride coplanar waveguide resonators Vissers, M. R.; Gao, J.; Wisbey, D. S. Applied Physics Letters, Vol. 97, Issue 23 https://doi.org/10.1063/1.3517252	journal	December 2010
Strongly disordered TiN and NbTiN s-wave superconductors probed by microwave electrodynamics Driessen, E. F. C.; Coumou, P. C. J. J.; Tromp, R. R. arXiv https://doi.org/10.48550/arxiv.1205.2463	text	January 2012
Linear-in- $T$ resistivity in dilute metals: A Fermi liquid perspective Hwang, E. H.; Das Sarma, S. Physical Review B, Vol. 99, Issue 8 https://doi.org/10.1103/PhysRevB.99.085105	journal	February 2019
Etch induced microwave losses in titanium nitride superconducting resonators Sandberg, Martin; Vissers, Michael R.; Kline, Jeffrey S. Applied Physics Letters, Vol. 100, Issue 26 https://doi.org/10.1063/1.4729623	journal	June 2012
The dependence of the superconducting critical temperature of dilute magnetic alloys on impurity concentration Ludwig, A.; Zuckermann, M. J. Journal of Physics F: Metal Physics, Vol. 1, Issue 4 https://doi.org/10.1088/0305-4608/1/4/324	journal	July 1971
Etch Induced Microwave Losses in Titanium Nitride Superconducting Resonators Sandberg, Martin; Vissers, Michael R.; Kline, Jeffrey S. arXiv https://doi.org/10.48550/arxiv.1205.3153	text	January 2012
Experimental demonstration of titanium nitride plasmonic interconnects Kinsey, N.; Ferrera, M.; Naik, G. V. Optics Express, Vol. 22, Issue 10 https://doi.org/10.1364/OE.22.012238	journal	January 2014
Electrical Resistivity Model for Polycrystalline Films: the case of Specular Reflection at External Surfaces Mayadas, A. F.; Shatzkes, M.; Janak, J. F. Applied Physics Letters, Vol. 14, Issue 11 https://doi.org/10.1063/1.1652680	journal	June 1969
High quality superconducting titanium nitride thin film growth using infrared pulsed laser deposition Torgovkin, A.; Chaudhuri, S.; Ruhtinas, A. Superconductor Science and Technology, Vol. 31, Issue 5 https://doi.org/10.1088/1361-6668/aab7d6	journal	April 2018
Magnetic-Field Enhancement of Superconductivity in Ultranarrow Wires Rogachev, A.; Wei, T. -C.; Pekker, D. Physical Review Letters, Vol. 97, Issue 13 https://doi.org/10.1103/PhysRevLett.97.137001	journal	September 2006
Hot electrons and energy transport in metals at millikelvin temperatures Roukes, M. L.; Freeman, M. R.; Germain, R. S. Physical Review Letters, Vol. 55, Issue 4 https://doi.org/10.1103/PhysRevLett.55.422	journal	July 1985
Electrons and Phonons Ziman, J. M. https://doi.org/10.1093/acprof:oso/9780198507796.001.0001	book	January 2001
Localization of preformed Cooper pairs in disordered superconductors Sacépé, Benjamin; Dubouchet, Thomas; Chapelier, Claude Nature Physics, Vol. 7, Issue 3 https://doi.org/10.1038/nphys1892	journal	January 2011
Optimization of sputtered titanium nitride as a tunable metal for plasmonic applications Zgrabik, Christine M.; Hu, Evelyn L. Optical Materials Express, Vol. 5, Issue 12 https://doi.org/10.1364/OME.5.002786	journal	January 2015
The mean free path of electrons in metals Sondheimer, E. H. Advances in Physics, Vol. 50, Issue 6 https://doi.org/10.1080/00018730110102187	journal	September 2001
Room-Temperature Ferromagnetism in Epitaxial Titanium Nitride Thin Films Gupta, Siddharth; Moatti, Adele; Bhaumik, Anagh SSRN Electronic Journal https://doi.org/10.2139/ssrn.3277523	journal	January 2018
Suppression of low-frequency charge noise in superconducting resonators by surface spin desorption de Graaf, S. E.; Faoro, L.; Burnett, J. Nature Communications, Vol. 9, Issue 1 https://doi.org/10.1038/s41467-018-03577-2	journal	March 2018
Qubit compatible superconducting interconnects Foxen, B.; Mutus, J. Y.; Lucero, E. Quantum Science and Technology, Vol. 3, Issue 1 https://doi.org/10.1088/2058-9565/aa94fc	journal	November 2017
Superconducting phase transitions in ultrathin TiN films Baturina, T. I.; Postolova, S. V.; Mironov, A. Yu. arXiv https://doi.org/10.48550/arxiv.1109.5270	text	January 2011
Cryogenic characterization of titanium nitride thin films Vertchenko, Larissa; Leandro, Lorenzo; Shkondin, Evgeniy Optical Materials Express, Vol. 9, Issue 5 https://doi.org/10.1364/OME.9.002117	journal	January 2019
Evidence of Surface Paramagnetism in Niobium and Consequences for the Superconducting Cavity Surface Impedance Proslier, Thomas; Kharitonov, M.; Pellin, M. IEEE Transactions on Applied Superconductivity, Vol. 21, Issue 3 https://doi.org/10.1109/TASC.2011.2107491	journal	June 2011
Room-temperature ferromagnetism observed in undoped semiconducting and insulating oxide thin films Hong, Nguyen Hoa; Sakai, Joe; Poirot, Nathalie Physical Review B, Vol. 73, Issue 13 https://doi.org/10.1103/PhysRevB.73.132404	journal	April 2006
Hard gap in epitaxial semiconductor–superconductor nanowires Chang, W.; Albrecht, S. M.; Jespersen, T. S. Nature Nanotechnology, Vol. 10, Issue 3 https://doi.org/10.1038/nnano.2014.306	journal	January 2015
Disorder-Induced Inhomogeneities of the Superconducting State Close to the Superconductor-Insulator Transition Sacépé, B.; Chapelier, C.; Baturina, T. I. Physical Review Letters, Vol. 101, Issue 15 https://doi.org/10.1103/PhysRevLett.101.157006	journal	October 2008
Titanium nitride: A correlated metal at the threshold of a Mott transition Allmaier, H.; Chioncel, L.; Arrigoni, E. Physical Review B, Vol. 79, Issue 23 https://doi.org/10.1103/PhysRevB.79.235126	journal	June 2009
Raman scattering, superconductivity, and phonon density of states of stoichiometric and nonstoichiometric TiN Spengler, W.; Kaiser, R.; Christensen, A. N. Physical Review B, Vol. 17, Issue 3 https://doi.org/10.1103/PhysRevB.17.1095	journal	February 1978
Superconducting transition temperature in a Nb/ ${Nb}_{x}$ ${Si}_{1 - x}$ bilayer system Hsu, Julia W. P.; Park, Sung I.; Deutscher, G. Physical Review B, Vol. 43, Issue 4 https://doi.org/10.1103/PhysRevB.43.2648	journal	February 1991
Plasmonics: Fundamentals and Applications Maier, Stefan A. https://doi.org/10.1007/0-387-37825-1	book	January 2007
Dephasing by Extremely Dilute Magnetic Impurities Revealed by Aharonov-Bohm Oscillations Pierre, F.; Birge, Norman O. Physical Review Letters, Vol. 89, Issue 20 https://doi.org/10.1103/PhysRevLett.89.206804	journal	October 2002
Tunneling study of cavity grade Nb: Possible magnetic scattering at the surface Proslier, T.; Zasadzinski, J. F.; Cooley, L. Applied Physics Letters, Vol. 92, Issue 21 https://doi.org/10.1063/1.2913764	journal	May 2008
Magnetic Flux Noise in dc SQUIDs: Temperature and Geometry Dependence Anton, S. M.; Birenbaum, J. S.; O’Kelley, S. R. Physical Review Letters, Vol. 110, Issue 14 https://doi.org/10.1103/PhysRevLett.110.147002	journal	April 2013
Titanium nitride as a plasmonic material for visible and near-infrared wavelengths Naik, Gururaj V.; Schroeder, Jeremy L.; Ni, Xingjie Optical Materials Express, Vol. 2, Issue 4 https://doi.org/10.1364/OME.2.000478	journal	January 2012
Kondo Effect in Superconductors Müller-Hartmann, E.; Zittartz, J. Physical Review Letters, Vol. 26, Issue 8 https://doi.org/10.1103/PhysRevLett.26.428	journal	February 1971
The mean free path of electrons in metals Sondheimer, E. H. Advances in Physics, Vol. 1, Issue 1 https://doi.org/10.1080/00018735200101151	journal	January 1952
Fabrication and Characterization of Epitaxial TiN-Based Josephson Junctions for Superconducting Circuit Applications Makise, K.; Sun, R.; Terai, H. IEEE Transactions on Applied Superconductivity, Vol. 25, Issue 3 https://doi.org/10.1109/TASC.2014.2364214	journal	June 2015
Origin of magnetic moments in defective ${TiO}_{2}$ single crystals Zhou, Shengqiang; Čižmár, E.; Potzger, K. Physical Review B, Vol. 79, Issue 11 https://doi.org/10.1103/PhysRevB.79.113201	journal	March 2009
Oxygen-defect-induced magnetism to 880 K in semiconducting anatase TiO _2−δ films Yoon, Soack Dae; Chen, Yajie; Yang, Aria Journal of Physics: Condensed Matter, Vol. 18, Issue 27 https://doi.org/10.1088/0953-8984/18/27/L01	journal	June 2006
Tunneling study of cavity grade Nb: possible magnetic scattering at the surface Proslier, T.; Zasadzinski, J. F.; Cooley, L. arXiv https://doi.org/10.48550/arxiv.0803.2852	text	January 2008
Titanium Nitride Films for Ultrasensitive Microresonator Detectors Leduc, Henry G.; Bumble, Bruce; Day, Peter K. arXiv https://doi.org/10.48550/arxiv.1003.5584	text	January 2010
Optical Properties of Plasmonic Ultrathin TiN Films Shah, Deesha; Reddy, Harsha; Kinsey, Nathaniel Advanced Optical Materials, Vol. 5, Issue 13 https://doi.org/10.1002/adom.201700065	journal	May 2017
Fluctuation spectroscopy: From Rayleigh-Jeans waves to Abrikosov vortex clusters Varlamov, A. A.; Galda, A.; Glatz, A. Reviews of Modern Physics, Vol. 90, Issue 1 https://doi.org/10.1103/RevModPhys.90.015009	journal	March 2018
Titanium nitride films for ultrasensitive microresonator detectors Leduc, Henry G.; Bumble, Bruce; Day, Peter K. Applied Physics Letters, Vol. 97, Issue 10 https://doi.org/10.1063/1.3480420	journal	September 2010
Origin and Reduction of $1 / f$ Magnetic Flux Noise in Superconducting Devices Kumar, P.; Sendelbach, S.; Beck, M. A. Physical Review Applied, Vol. 6, Issue 4 https://doi.org/10.1103/PhysRevApplied.6.041001	journal	October 2016
The conductivity of thin metallic films according to the electron theory of metals Fuchs, K. Mathematical Proceedings of the Cambridge Philosophical Society, Vol. 34, Issue 1 https://doi.org/10.1017/S0305004100019952	journal	January 1938
Effective electron mean free path in TiN(001) Chawla, J. S.; Zhang, X. Y.; Gall, D. Journal of Applied Physics, Vol. 113, Issue 6 https://doi.org/10.1063/1.4790136	journal	February 2013
Enhanced magnetic surface scattering of weakly localized electrons Vranken, J.; Van Haesendonck, C.; Bruynseraede, Y. Physical Review B, Vol. 37, Issue 14 https://doi.org/10.1103/PhysRevB.37.8502	journal	May 1988
Local Heating with Lithographically Fabricated Plasmonic Titanium Nitride Nanoparticles Guler, Urcan; Ndukaife, Justus C.; Naik, Gururaj V. Nano Letters, Vol. 13, Issue 12 https://doi.org/10.1021/nl4033457	journal	November 2013
Theory of thermal relaxation of electrons in metals Allen, Philip B. Physical Review Letters, Vol. 59, Issue 13 https://doi.org/10.1103/PhysRevLett.59.1460	journal	September 1987
Analysis and mitigation of interface losses in trenched superconducting coplanar waveguide resonators Calusine, G.; Melville, A.; Woods, W. Applied Physics Letters, Vol. 112, Issue 6 https://doi.org/10.1063/1.5006888	journal	February 2018
GaN/NbN epitaxial semiconductor/superconductor heterostructures Yan, Rusen; Khalsa, Guru; Vishwanath, Suresh Nature, Vol. 555, Issue 7695 https://doi.org/10.1038/nature25768	journal	March 2018
Suppression of superconductivity in homogeneously disordered systems Finkel'stein, A. M. Physica B: Condensed Matter, Vol. 197, Issue 1-4 https://doi.org/10.1016/0921-4526(94)90267-4	journal	March 1994
Room-temperature ferromagnetism in epitaxial titanium nitride thin films Gupta, Siddharth; Moatti, Adele; Bhaumik, Anagh Acta Materialia, Vol. 166 https://doi.org/10.1016/j.actamat.2018.12.041	journal	March 2019
XPS study of multilayer multicomponent films Lubenchenko, Alexander V.; Batrakov, Alexander A.; Pavolotsky, Alexey B. Applied Surface Science, Vol. 427 https://doi.org/10.1016/j.apsusc.2017.07.256	journal	January 2018
Dephasing of electrons in mesoscopic metal wires Pierre, F.; Gougam, A. B.; Anthore, A. Physical Review B, Vol. 68, Issue 8 https://doi.org/10.1103/PhysRevB.68.085413	journal	August 2003
Superconducting phase transitions in ultrathin TiN films Baturina, T. I.; Postolova, S. V.; Mironov, A. Yu. EPL (Europhysics Letters), Vol. 97, Issue 1 https://doi.org/10.1209/0295-5075/97/17012	journal	January 2012
Model for $1 / f$ Flux Noise in SQUIDs and Qubits Koch, Roger H.; DiVincenzo, David P.; Clarke, John Physical Review Letters, Vol. 98, Issue 26 https://doi.org/10.1103/PhysRevLett.98.267003	journal	June 2007
Persistence of superconductivity in niobium ultrathin films grown on R-plane sapphire Delacour, Cécile; Ortega, Luc; Faucher, Marc Physical Review B, Vol. 83, Issue 14 https://doi.org/10.1103/PhysRevB.83.144504	journal	April 2011
Low Loss Superconducting Titanium Nitride Coplanar Waveguide Resonators Vissers, Michael R.; Gao, Jiansong; Wisbey, David S. arXiv https://doi.org/10.48550/arxiv.1007.5096	text	January 2010
Strongly Disordered TiN and NbTiN $s$ -Wave Superconductors Probed by Microwave Electrodynamics Driessen, E. F. C.; Coumou, P. C. J. J.; Tromp, R. R. Physical Review Letters, Vol. 109, Issue 10 https://doi.org/10.1103/PhysRevLett.109.107003	journal	September 2012
Complex Inductance, Excess Noise, and Surface Magnetism in dc SQUIDs Sendelbach, S.; Hover, D.; Mück, M. Physical Review Letters, Vol. 103, Issue 11 https://doi.org/10.1103/PhysRevLett.103.117001	journal	September 2009
Proximity effect in ultrathin Pb/Ag multilayers within the Cooper limit Bourgeois, O.; Frydman, A.; Dynes, R. C. Physical Review B, Vol. 68, Issue 9 https://doi.org/10.1103/PhysRevB.68.092509	journal	September 2003
Superconducting Resonators Based on TiN/Tapering/NbN/Tapering/TiN Heterostructures : Superconducting Resonators Based on TiN/Tapering/NbN/Tapering/TiN… Tang, Yong-Chao; Zhang, Hui; Kwon, Sangil Advanced Engineering Materials, Vol. 18, Issue 10 https://doi.org/10.1002/adem.201600226	journal	August 2016
Room temperature deposition of sputtered TiN films for superconducting coplanar waveguide resonators Ohya, S.; Chiaro, B.; Megrant, A. Superconductor Science and Technology, Vol. 27, Issue 1 https://doi.org/10.1088/0953-2048/27/1/015009	journal	December 2013
Enhancement of room temperature ferromagnetism in N-doped TiO2−x rutile: Correlation with the local electronic properties Drera, G.; Mozzati, M. C.; Galinetto, P. Applied Physics Letters, Vol. 97, Issue 1 https://doi.org/10.1063/1.3458699	journal	July 2010
Plasmonic properties of refractory titanium nitride Catellani, Alessandra; Calzolari, Arrigo Physical Review B, Vol. 95, Issue 11 https://doi.org/10.1103/PhysRevB.95.115145	journal	March 2017
Improved superconducting qubit coherence using titanium nitride Chang, Josephine B.; Vissers, Michael R.; Córcoles, Antonio D. Applied Physics Letters, Vol. 103, Issue 1 https://doi.org/10.1063/1.4813269	journal	July 2013

Similar Records

Coherent growth of superconducting TiN thin films by plasma enhanced molecular beam epitaxy

Journal Article · Mon Oct 15 00:00:00 EDT 2012 · Journal of Applied Physics · OSTI ID:1803145

Krockenberger, Yoshiharu; Karimoto, Shin-ichi; Yamamoto, Hideki; +1 more

The influence of ion-irradiated induced disorder and post-annealing on thin film superconductive compounds MoN, VN, and TiN

Conference · Mon Jun 01 00:00:00 EDT 1987 · OSTI ID:1803145

Christen, D K; Ellis, J T; Sekula, S T; +4 more

Correlation of structural quality with superconducting behavior in epitaxial thin films of Ba sub 2 YCu sub 3 O sub 7 minus. delta. on LaAlO sub 3 (100)

Journal Article · Fri Nov 01 00:00:00 EST 1991 · Journal of Applied Physics; (United States) · OSTI ID:1803145

Siegal, M P; Phillips, J M; Hebard, A F; +4 more

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
Physics

Title: Superconductivity Behavior in Epitaxial TiN Films Points to Surface Magnetic Disorder

Citation Formats

References (66)

Similar Records

Related Subjects