Beam-Based Defect Localization in ICs.
Conference
·
OSTI ID:1716647
Abstract not provided.
- Research Organization:
- Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE National Nuclear Security Administration (NNSA)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 1716647
- Report Number(s):
- SAND2007-6572P; 520684
- Resource Relation:
- Conference: Proposed for presentation at the 2007 IEEE International Integrated Reliability Workshop held November 15-18, 2007 in S. Lake Tahoe, CA.
- Country of Publication:
- United States
- Language:
- English
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