Non-destructive IC defect localization using optical beam-based imaging.
Conference
·
OSTI ID:947795
Optical beam failure analysis methods provide unique capabilities to identify and localize defect types that would be difficult or impossible by other methods. by understanding the physics of signal generation, the user gains the insight necessary to optimize technique performance.
- Research Organization:
- Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 947795
- Report Number(s):
- SAND2008-5507C; TRN: US200905%%163
- Resource Relation:
- Conference: Proposed for presentation at the IEEE Custom Integrated Circuits Conference held September 21-24, 2008 in San Jose, CA.
- Country of Publication:
- United States
- Language:
- English
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