Non-destructive IC defect localization using optical beam-based imaging.
Conference
·
OSTI ID:947795
Optical beam failure analysis methods provide unique capabilities to identify and localize defect types that would be difficult or impossible by other methods. by understanding the physics of signal generation, the user gains the insight necessary to optimize technique performance.
- Research Organization:
- Sandia National Laboratories
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 947795
- Report Number(s):
- SAND2008-5507C
- Country of Publication:
- United States
- Language:
- English
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