MM-wave cavity/klystron developments using deep x-ray lithography at the Advanced Photon Source.
Recent microfabrication technologies based on LIGA (German acronym for Li thographe, G alvanoformung, und A bformung) have been applied to build high-aspect-ratio, metallic or dielectric, planar structures suitable for high frequency rf cavity structures. The cavity structures would be used as parts of linear accelerators, microwave undulators, and mm-wave amplifiers. The microfabrication process includes manufacturing of precision x-ray masks, exposure of positive resist by x-rays through the mask, resist development, and electroforming of the final microstructure. Prototypes of a 32-cell, 108-GHz constant impedance cavity and a 66-cell, 94-GHz constant-gradient cavity were fabricated using the synchrotron radiation sources at APS. Preliminary design parameters for a 91- GHz modulator klystron along with an overview of the new technology are discussed.
- Research Organization:
- Argonne National Lab., Argonne, IL (US)
- Sponsoring Organization:
- USDOE Office of Energy Research, Washington, DC (US)
- DOE Contract Number:
- W-31-109-ENG-38
- OSTI ID:
- 16702
- Report Number(s):
- ANL/ASD/CP-96138; ON: DE98057595; TRN: US200433%%170
- Resource Relation:
- Conference: APAC '98 Conference, Tsukuba (JP), 03/24/1998--03/27/1998; Other Information: Supercedes report DE98057595; PBD: 31 Mar 1998
- Country of Publication:
- United States
- Language:
- English
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