LIGA fabrication of mm-wave accelerating cavity structures at the Advanced Photon Source (APS)
- and others
Recent microfabrication technologies based on the LIGA (German acronym for Lithographe, Galvanoformung, und Abformung) process have been applied to build high-aspect-ratio, metallic or dielectric planar structures suitable for high-frequency rf cavity structures. The cavity structures would be used as parts of linear accelerators, microwave undulators, and mm-wave amplifiers. The microfabrication process includes manufacture of precision x-ray masks, exposure of positive resist x-rays through the mask, resist development, and electroforming of the final microstructure. Prototypes of a 32-cell, 108-GHz constant-impedance cavity and a 66-cell, 94-GHz constant-gradient cavity were fabricated with the synchrotron radiation sources at APS and NSLS. This paper will present an overview of the new technology and details of the mm-wave cavity fabrication.
- Research Organization:
- Argonne National Lab., IL (United States)
- Sponsoring Organization:
- USDOE Office of Energy Research, Washington, DC (United States)
- DOE Contract Number:
- W-31109-ENG-38
- OSTI ID:
- 542028
- Report Number(s):
- ANL/ASD/CP--92274; CONF-970503--; ON: DE97053309
- Country of Publication:
- United States
- Language:
- English
Similar Records
MM-wave cavity/klystron developments using deep x-ray lithography at the Advanced Photon Source.
LIGA-fabricated compact mm-wave linear accelerator cavities.