LIGA-fabricated compact mm-wave linear accelerator cavities.
Millimeter-wave rf cavities for use in linear accelerators, free-electron lasers, and mm-wave undulatory are under development at Argonne National Laboratory. Typical cavity dimensions are in the 1000 mm range, and the overall length of the accelerator structure, which consists of 30-100 cavities, is about 50-100 mm. An accuracy of 0.2% in the cavity dimensions is necessary in order to achieve a high Q-factor of the cavity. To achieve this these structures are being fabricated using deep X-ray lithography, electroforming, and assembly (LIGA). The first prototype cavity structures are designed for 108 GHz and 2p/3-mode operation. Input and output couplers are integrated with the cavity structures. The cavities are fabricated on copper substrates by electroforming copper into 1-mm-thick PMMA resists patterned by deep x-ray lithography and polishing the copper down to the desired thickness. These are fabricated separately and subsequently assembled with precision spacing and alignment using microspheres, optical fibers, or microfabricated spacers/alignment pieces. Details of the fabrication process, alignment, and assembly work are presented in here.
- Research Organization:
- Argonne National Lab., IL (US)
- Sponsoring Organization:
- US Department of Energy (US)
- DOE Contract Number:
- W-31109-ENG-38
- OSTI ID:
- 7843
- Report Number(s):
- ANL/ASD/CP-92655
- Country of Publication:
- United States
- Language:
- English
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