skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: High-Q CMOS-integrated photonic crystal microcavity devices

Journal Article · · Scientific Reports
DOI:https://doi.org/10.1038/srep04077· OSTI ID:1624691
 [1];  [1];  [2];  [2];  [3];  [4];  [1]
  1. Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States). Dept. of Electrical Engineering and Computer Science and Research Lab. of Electronics
  2. Micron Semiconductor Israel, Kiryat-Gat (Israel)
  3. Micron Technology, Inc., San Jose, CA (United States). Process R&D
  4. Micron Technology, Inc., Boise, ID (United States). Process R&D
+ Show Author Affiliations

Integrated optical resonators are necessary or beneficial in realizations of various functions in scaled photonic platforms, including filtering, modulation, and detection in classical communication systems, optical sensing, as well as addressing and control of solid state emitters for quantum technologies. Although photonic crystal (PhC) microresonators can be advantageous to the more commonly used microring devices due to the former’s low mode volumes, fabrication of PhC cavities has typically relied on electron-beam lithography, which precludes integration with large-scale and reproducible CMOS fabrication. Here, we demonstrate wavelength-scale polycrystalline silicon (pSi) PhC microresonators with Qs up to 60,000 fabricated within a bulk CMOS process. Quasi-1D resonators in lateral p-i-n structures allow for resonant defect-state photodetection in all-silicon devices, exhibiting voltage-dependent quantum efficiencies in the range of a few 10 s of %, few-GHz bandwidths, and low dark currents, in devices with loaded Qs in the range of 4,300–9,300; one device, for example, exhibited a loaded Q of 4,300, 25% quantum efficiency (corresponding to a responsivity of 0.31 A/W), 3 GHz bandwidth, and 30 nA dark current at a reverse bias of 30 V. This work demonstrates the possibility for practical integration of PhC microresonators with active electro-optic capability into large-scale silicon photonic systems.

Research Organization:
Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)
Sponsoring Organization:
USDOE Office of Science (SC)
OSTI ID:
1624691
Journal Information:
Scientific Reports, Vol. 4, Issue 1; ISSN 2045-2322
Publisher:
Nature Publishing GroupCopyright Statement
Country of Publication:
United States
Language:
English

References (46)

High-Q, Low Index-Contrast Polymeric Photonic Crystal Nanobeam Cavities conference January 2012
Microring resonator channel dropping filters journal June 1997
Micrometre-scale silicon electro-optic modulator journal May 2005
Optical microcavities journal August 2003
Spontaneous-emission control by photonic crystals and nanocavities journal August 2007
A Monolithically-Integrated Optical Receiver in Standard 45-nm SOI journal July 2012
Hall Mobility in Chemically Deposited Polycrystalline Silicon journal October 1971
All silicon infrared photodiodes: photo response and effects of processing temperature journal January 2007
Meep: A flexible free-software package for electromagnetic simulations by the FDTD method journal March 2010
Effects of disorder on propagation losses and cavity Q-factors in photonic crystal slabs journal December 2005
Optical microcavities conference January 2005
Building Many-Core Processor-to-DRAM Networks with Monolithic CMOS Silicon Photonics journal July 2009
Ultra-low Threshold Electrically Pumped Quantum Dot Photonic Crystal Nanocavity Laser conference January 2011
Light scattering and Fano resonances in high-Q photonic crystal nanocavities journal February 2009
Meep: A flexible free-software package for electromagnetic simulations by the FDTD method dataset January 2019
Linear Photonic Crystal Microcavities in Zero-Change SOI CMOS conference January 2013
Density of gap states of silicon grain boundaries determined by optical absorption journal July 1983
Towards fabless silicon photonics journal August 2010
Block-iterative frequency-domain methods for Maxwell's equations in a planewave basis journal January 2001
Photodetection in silicon beyond the band edge with surface states journal January 2008
High-Q photonic nanocavity in a two-dimensional photonic crystal journal October 2003
High-Q, low index-contrast polymeric photonic crystal nanobeam cavities journal January 2011
Ultrahigh-Q photonic crystal nanocavities realized by the local width modulation of a line defect journal January 2006
Silicon waveguide infrared photodiodes with >35 GHz bandwidth and phototransistors with 50 AW-1 response journal January 2009
Deterministic design of wavelength scale, ultra-high Q photonic crystal nanobeam cavities journal January 2011
Open foundry platform for high-performance electronic-photonic integration journal January 2012
Photonic crystal nanobeam cavity strongly coupled to the feeding waveguide journal May 2010
A monolithically-integrated optical receiver in standard 45-nm SOI conference September 2011
Fabrication of Photonic Wire and Crystal Circuits in Silicon-on-Insulator Using 193-nm Optical Lithography journal September 2009
Ultralow-threshold electrically pumped quantum-dot photonic-crystal nanocavity laser journal April 2011
Fano line shapes in transmission spectra of silicon photonic crystal resonators journal February 2013
Momentum space design of high-Q photonic crystal optical cavities journal January 2002
Active control of slow light on a chip with photonic crystal waveguides journal November 2005
Integrated quantum optical networks based on quantum dots and photonic crystals journal May 2011
Enhancement of nonlinear effects using photonic crystals journal April 2004
Nonlinear response of silicon photonic crystal micresonators excited via an integrated waveguide and fiber taper journal January 2005
Meep: A flexible free-software package for electromagnetic simulations by the FDTD method dataset January 2019
Ultra-low Threshold Electrically Pumped Quantum Dot Photonic Crystal Nanocavity Laser conference January 2011
Deterministic design of wavelength scale, ultra-high Q photonic crystal nanobeam cavities text January 2011
Controlling the Spontaneous Emission Rate of Single Quantum Dots in a Two-Dimensional Photonic Crystal journal July 2005
Characterization of Integrated Planar Photonic Crystal Circuits Fabricated by a CMOS Foundry journal January 2013
Photonic Device Layout Within the Foundry CMOS Design Environment journal April 2010
Silicon photonic resonator-enhanced defect-mediated photodiode for sub-bandgap detection journal January 2010
Low-loss polysilicon waveguides fabricated in an emulated high-volume electronics process journal January 2012
Waveguide-integrated telecom-wavelength photodiode in deposited silicon journal December 2010
Using carrier-depletion silicon modulators for optical power monitoring journal January 2012

Cited By (10)

Photonic crystal nanocavity with a Q factor exceeding eleven million journal January 2017
Photonic crystals with plasmonic patterns: novel type of the heterostructures for enhanced magneto-optical activity journal February 2015
Implementing a Raman silicon nanocavity laser for integrated optical circuits by using a (100) SOI wafer with a 45-degree-rotated top silicon layer journal January 2019
Ultrahigh- Q Photonic Nanocavity Devices on a Dual Thickness SOI Substrate Operating at Both 1.31- and 1.55-µm Telecommunication Wavelength Bands journal January 2019
Ultrahigh-Q optomechanical crystal cavities fabricated in a CMOS foundry journal May 2017
State-of-the-art all-silicon sub-bandgap photodetectors at telecom and datacom wavelengths: State-of-the-art all-silicon sub-bandgap photodetectors at telecom and datacom wavelengths journal September 2016
Sub-bandgap polysilicon photodetector in zero-change CMOS process for telecommunication wavelength journal January 2015
Precise and diffraction-limited waveguide-to-free-space focusing gratings journal May 2017
Recent advances in silicon-based passive and active optical interconnects journal January 2015
Precise and diffraction-limited waveguide-to-free-space focusing gratings text January 2016

Similar Records

High-bandwidth CMOS-voltage-level electro-optic modulation of 780 nm light in thin-film lithium niobate
Journal Article · Thu Jun 09 00:00:00 EDT 2022 · Optics Express · OSTI ID:1624691
+7 more
Optimizing photon-pair generation electronically using a p-i-n diode incorporated in a silicon microring resonator
Journal Article · Mon Sep 28 00:00:00 EDT 2015 · Applied Physics Letters · OSTI ID:1624691
Ion traps fabricated in a CMOS foundry
Journal Article · Mon Jul 28 00:00:00 EDT 2014 · Applied Physics Letters · OSTI ID:1624691
+2 more

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
Micro-optics
Optics and photonics