Decomposition of ammonia on ZrB2(0001)
Journal Article
·
· Chemical Physics Letters
- Argonne National Lab. (ANL), Argonne, IL (United States); Lake Forest College, Lake Forest, IL (United States)
- Univ. of Illinois, Chicago, IL (United States)
- Argonne National Lab. (ANL), Argonne, IL (United States)
Zirconium diboride has been recently identified as a promising substrate for the growth of Group-III nitride semiconductors using reactive vapors that include ammonia as the nitrogen source. Adsorption energies and dissociation pathways of NH3 on the (0001) surface of ZrB2 were investigated using density functional theory calculations. Here, our results indicate that NH3 readily adsorbs onto the ZrB2 surface terminated with Zr and decomposes to atomic N and H with relatively small activation barriers. The resulting atomic species are found to be mobile with the computed diffusion barriers between 0.11 and 0.78 eV.
- Research Organization:
- Argonne National Laboratory (ANL), Argonne, IL (United States)
- Sponsoring Organization:
- USDOE Office of Science (SC), Basic Energy Sciences (BES); National Science Foundation (NSF)
- Grant/Contract Number:
- AC02-06CH11357; CHE-1800236
- OSTI ID:
- 1595942
- Alternate ID(s):
- OSTI ID: 1579267
- Journal Information:
- Chemical Physics Letters, Vol. 739, Issue C; ISSN 0009-2614
- Publisher:
- ElsevierCopyright Statement
- Country of Publication:
- United States
- Language:
- English
Cited by: 3 works
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